Maria Makarova
Stanford University
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Publication
Featured researches published by Maria Makarova.
Applied Physics Letters | 2011
Yijie Huo; Hai Lin; Robert Chen; Maria Makarova; Yiwen Rong; Mingyang Li; Theodore I. Kamins; Jelena Vuckovic; James S. Harris
Highly tensile-strained layers of Ge were grown via molecular beam epitaxy using step-graded InxGa1−xAs buffer layers on (100) GaAs. These layers have biaxial tensile-strain of up to 2.33%, have surface roughness of <1.1 nm, and are of high quality as seen with transmission electron microscopy. Low-temperature photoluminescence (PL) suggests the existence of direct-bandgap Ge when the strain is greater than 1.7%, and we see a greater than 100× increase in the PL intensity of the direct transition with 2.33% tensile-strain over the unstrained case. These results show promise for the use of tensile-strained Ge in optoelectronics monolithically integrated on Si.
Applied Physics Letters | 2008
Maria Makarova; Vanessa Sih; J. Warga; Rui Li; Luca Dal Negro; Jelena Vuckovic
Photonic crystal nanocavities are fabricated in silicon membranes covered by thermally annealed silicon-rich nitride films with Erbium-doped silicon nanocrystals. Silicon nitride films were deposited by sputtering on top of silicon on insulator wafers. The nanocavities were carefully designed in order to enhance emission from the nanocrystal sensitized Erbium at the 1540nm wavelength. Experimentally measured quality factors of ∼6000 were found to be consistent theoretical predictions. The Purcell factor of 1.4 was estimated from the observed 20-fold enhancement of Erbium luminescence.
Optics Express | 2010
Yiyang Gong; Maria Makarova; Selcuk Yerci; Rui Li; Martin J. Stevens; Burm Baek; Sae Woo Nam; Robert H. Hadfield; Sander N. Dorenbos; Val Zwiller; Jelena Vuckovic; Luca Dal Negro
Light emission from Er-doped amorphous silicon nitride coupled to photonic crystal resonators is studied. The results demonstrate Purcell enhanced Er absorption and linewidth narrowing of the cavity resonance with increasing pump power.
Optics Express | 2010
Yiyang Gong; Maria Makarova; Selcuk Yerci; Rui Li; Martin J. Stevens; Burm Baek; Sae Woo Nam; Luca Dal Negro; Jelena Vuckovic
One dimensional nanobeam photonic crystal cavities are fabricated in an Er-doped amorphous silicon nitride layer. Photoluminescence from the cavities around 1.54 microm is studied at cryogenic and room temperatures at different optical pump powers. The resonators demonstrate Purcell enhanced absorption and emission rates, also confirmed by time resolved measurements. Resonances exhibit linewidth narrowing with pump power, signifying absorption bleaching and the onset of stimulated emission in the material at both 5.5 K and room temperature. We estimate from the cavity linewidths that Er has been pumped to transparency at the cavity resonance wavelength.
IEEE Journal of Selected Topics in Quantum Electronics | 2010
Maria Makarova; Yiyang Gong; Szu-Lin Cheng; Yoshio Nishi; Selcuk Yerci; Rui Li; Luca Dal Negro; Jelena Vuckovic
Efficient silicon (Si)-compatible emitters can realize inexpensive light sources for a variety of applications. In this paper, we study both photonic crystal (PC) and plasmonic nanocavities that enhance the emission of Si-compatible materials. In particular, we examine the coupling of silicon nanocrystals (Si-NCs) to silicon nitride PC cavities and Si-NCs in silicon dioxide to plasmonic gratings, both for enhancement of emission in the visible wavelengths. In addition, we also observe the enhancement of the 1530 nm emission from erbium-doped silicon nitride films coupled to Si PC cavities. Finally, we analyze the loss mechanisms associated with the hybrid silicon nitride/silicon system, and propose advancements in the designs of PC and plasmonic cavities for the emitters described in this paper.
conference on lasers and electro optics | 2010
Yiyang Gong; Maria Makarova; Selcuk Yerci; Rui Li; Luca Dal Negro; Jelena Vuckovic
Light emission from Er-doped amorphous silicon nitride coupled to photonic crystal resonators is studied. The results demonstrate Purcell enhanced Er absorption and linewidth narrowing of the cavity resonance with increasing pump power.
quantum electronics and laser science conference | 2006
Maria Makarova; Jelena Vuckovic; Hiroyuki Sanda; Yoshio Nishi
We present design and fabrication of two-dimensional photonic crystal cavities made in nanoporous silicon luminescent at 700-800 nm. Enhancement in photoluminescence extraction efficiency at the resonant wavelength is expected due to Purcell effect.
Proceedings of SPIE, the International Society for Optical Engineering | 2010
Yiyang Gong; Maria Makarova; Selcuk Yerci; Rui Li; Marty Stevens; Burm Baek; Sae Woo Nam; Luca Dal Negro; Jelena Vuckovic
Light emission at 1.54 μm from an Er-doped amorphous silicon nitride layer coupled to photonic crystal resonators and plamonic arrays is studied. We observe the cavity resonances at cryogenic and room temperatures and under varying optical pump powers. The results demonstrate that small mode volume, high quality factor resonators enhance Er absorption rates dramatically at the cavity resonance. Photonic crystal cavity resonances exhibit linewidth narrowing with pump power at cryogenic temperatures, signifying absorption bleaching and partial inversion of the Er ions. In addition, we fabricate periodic metal-insulator-metal plasmonic structures with a simple bottom-up fabrication technique. We observe a factor of 10 increase of Er emission coupled to plasmonic structures.
quantum electronics and laser science conference | 2009
Yijie Huo; Hai Lin; Yiwen Rong; Maria Makarova; Theodore I. Kamins; Jelena Vuckovic; James S. Harris
We report up to 2.3% biaxial tensile-strained Ge layers grown on InGaAs/GaAs buffer layers. Low-temperature photoluminescence shows a dramatic intensity increase for ≫2% tensile strained Ge, confirming the existence of a direct band gap Ge.
international conference on group iv photonics | 2009
Yijie Huo; Hai Lin; Yiwen Rong; Maria Makarova; M. Li; Ray Chen; Theodore I. Kamins; Jelena Vuckovic; James S. Harris
Up to 2.3% biaxial tensile-strained Ge layers have been grown on InGaAs/GaAs buffer layers. A dramatic increase in low temperature photoluminescence intensity for >2% strained Ge confirms the existence of a direct band gap Ge.