Marie Jakoubková

IR laser thermolysis of tetramethylgermane for CVD of germanium

Abstract The CO 2 laser photosensitized (SF 6 ) decomposition of tetramethylgermane (TMG) yields C 1 and C 2 hydrocarbons along with a germanium deposit which contains some amounts of carbon and oxygen. The presence of these elements is judged to be caused by the adsorption of TMG on the surface of the deposit and by the sensitivity of the deposit to air.

Laser powered homogeneous decomposition of vinyl acetate

Abstract A continuous-wave CO2 laser photosensitized (SF6) decomposition of vinyl acetate proceeds in a way different from that in conventional hot-wall pyrolysis; it is controlled by a rearrangement/decarbonylation route affording acetone and carbon monoxide along with a higher temperature channel yielding acetic acid and acetylene.

CO2 laser-photosensitized decomposition of diethylsilane for deposition of SixC1-x coatings

CO2 laser photosensitized (SF6) decomposition of diethylsilane proceeds via molecular extrusion of ethene and affords solid Si/C/H materials which possess both Si-C and Si contributions, contain some fluorine from the sensitizing sulphur hexafluoride, and react with ambient atmosphere to incorporate oxygen.