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Mariusch Gregor

Applied Materials

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Publication

Featured researches published by Mariusch Gregor.

Archive | 1997

Apparatus and method for regulating a pressure in a chamber

Christian Beyer; Keith Trenton; Mariusch Gregor; Robert Stolle; Rudolph Bahnen; Anja Plugge; Heinz Frings; Karl-Heinz Ronthaler; Dennis R. Smith; Jayesh Patel

Archive | 2011

Methods and apparatus for calibrating flow controllers in substrate processing systems

James P. Cruse; John W. Lane; Mariusch Gregor; Duc Dang Buckius; Berrin Daran; Corie Lynn Cobb; Ming Xu; Andrew Nguyen

Archive | 2012

Methods for in-situ calibration of a flow controller

Balarabe N. Mohammed; John W. Lane; Mariusch Gregor; Dan Joseph Healy

Archive | 2009

Real time lead-line characterization for mfc flow verification

Mariusch Gregor; John W. Lane

Archive | 2012

METHODS FOR MONITORING A FLOW CONTROLLER COUPLED TO A PROCESS CHAMBER

Balarabe N. Mohammed; John W. Lane; Mariusch Gregor; Dan Joseph Healy

Archive | 2013

N-channel flow ratio controller calibration

Mariusch Gregor; John W. Lane

Archive | 2012

Methods and apparatus for processing substrates using model-based control

Keith Brian Porthouse; John W. Lane; Mariusch Gregor; Nir Merry; Michael R. Rice; Alex Minkovich; Hongbin Li; Dmitry A. Dzilno

Archive | 2012

Methods and Apparatus for Enhanced Gas Flow Rate Control

Mariusch Gregor; John W. Lane; Michael R. Rice; Justin Hough

Archive | 2008

Method and apparatus for dampening pressure fluctuations in a fluid delivery system

John W. Lane; Mariusch Gregor; Emir Vukotic

Archive | 2015

METHOD AND SYSTEM FOR CONTROLLING A FLOW RATIO CONTROLLER USING FEEDBACK

Mariusch Gregor

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John W. Lane

Applied Materials

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Michael R. Rice

Applied Materials

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Anja Plugge

Applied Materials

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Balarabe N. Mohammed

Applied Materials

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Berrin Daran

Applied Materials

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Christian Beyer

Applied Materials

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Dan Joseph Healy

Applied Materials

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Dennis R. Smith

Applied Materials

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Emir Vukotic

Applied Materials

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Heinz Frings

Applied Materials

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