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Martin Lee Riker

Applied Materials

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Archive | 2007

Substrate cleaning chamber and components

Martin Lee Riker; Wei W. Wang

Archive | 2009

Wafer processing deposition shielding components

Martin Lee Riker; Maurice E. Ewert; Anantha K. Subramani

Archive | 2011

ELECTROSTATIC CHUCK AND METHODS OF USE THEREOF

Shambhu N. Roy; Martin Lee Riker; Keith A. Miller; Vijay D. Parkhe; Steven V. Sansoni

Archive | 2015

COOLED PROCESS TOOL ADAPTER FOR USE IN SUBSTRATE PROCESSING CHAMBERS

William R. Fruchterman; Martin Lee Riker; Keith A. Miller; Anthony Infante

Archive | 2013

Method and apparatus deposition process synchronization

Winsor Lam; Keith A. Miller; Carl Johnson; Martin Lee Riker; Ye Xu

Archive | 2014

Sputter source for use in a semiconductor process chamber

Keith A. Miller; Martin Lee Riker

Archive | 2013

Target center positional constraint for physical vapor deposition (pvd) processing systems

Martin Lee Riker; Keith A. Miller; Balamurugan Ramasamy

Archive | 2013

Target cooling for physical vapor deposition (pvd) processing systems

Martin Lee Riker; Keith A. Miller

Archive | 2017

Collimater, collimater subassembly and base plate processing cavity

Martin Lee Riker; Zhang Fuhong; Anthony Infante; Wang Zheng

Archive | 2017

BIASABLE FLUX OPTIMIZER / COLLIMATOR FOR PVD SPUTTER CHAMBER

Martin Lee Riker; Fuhong Zhang; Anthony Infante; Zheng Wang

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