Masahiko Fukuta

Forming of Microstructure on Hard Brittle Materials in Ductile Mode Cutting

The requirement of the ultra-precision machine tools for ductile cutting of hard brittle materials was examined experimentally. One of the essential factors of achieving ductile mode cutting was not only high-resolution feedback control but also the dynamic performance of the machine tool in forming solid immersion lens of monocrystalline silicon. We also proposed newly developed method for ultra-precision machine tools, which does not have enough high dynamic performance in order to achieve ductile mode cutting of the hard brittle materials. An additional device consisted of air slider on the machine tool was applied to cutting of glass in order to keep stable ductile mode cutting. We fabricated high-value added structure, which are designed a diffraction grating, consisted of micro groove on a borosilicate crown glass surface with the developed device.

Improvement of grinding performance in ultra-precision grinding of lens mould by the help of megasonic coolant

In order to eliminate the difficulty in machining a tungsten carbide glass lens mould by using a fine diamond wheel, a new type of coolant supply method - the megasonic coolant supply method - is introduced. Using the megasonic coolant supply method, a substantial reduction in the error factor presently associated with the grinding wheel can be achieved, thus making it possible to achieve the target accuracy without using any compensation parameters. Increased wheel life and increased depth of cut have also been achieved along with an improvement in the machined surface quality.

The study about forming high-precision optical lens minimalized sinuous error structures for designed surface

Recently, it has been required to improve qualities of aspherical lenses mounted on camera units. Optical lenses in highvolume production generally are applied with molding process using cemented carbide or Ni-P coated steel, which can be selected from lens material such as glass and plastic. Additionally it can be obtained high quality of the cut or ground surface on mold due to developments of different mold product technologies. As results, it can be less than 100nmPV as form-error and 1nmRa as surface roughness in molds. Furthermore it comes to need higher quality, not only formerror( PV) and surface roughness(Ra) but also other surface characteristics. For instance, it can be caused distorted shapes at imaging by middle spatial frequency undulations on the lens surface. In this study, we made focus on several types of sinuous structures, which can be classified into form errors for designed surface and deteriorate optical system performances. And it was obtained mold product processes minimalizing undulations on the surface. In the report, it was mentioned about the analyzing process by using PSD so as to evaluate micro undulations on the machined surface quantitatively. In addition, it was mentioned that the grinding process with circumferential velocity control was effective for large aperture lenses fabrication and could minimalize undulations appeared on outer area of the machined surface, and mentioned about the optical glass lens molding process by using the high precision press machine.

Basic study on ductile-mode grinding of optical glass lenses with rubber bonded diamond wheels

Large aperture lenses with high surface quality are demanded for professional imaging products such as single-lens reflex cameras and astronomical telescopes. Large aperture optical lenses are shaped by ultra-precision grinding and finished by prolonged polishing. However, the prolonged polishing process leads to deterioration of the form accuracy. In order to reduce the amount of polishing, ductile-mode ultra-precision grinding is demanded. In this study, a rubber bonded wheel, which has a low elastic modulus, is used for grinding of spherical glass BK7, and influence of the hardness of the rubber bonded wheel and abrasive chip thickness on brittle fracture and surface roughness are experimentally investigated.

Dynamic Characteristics of Ultra-Precision Machine Tools (Evaluation for Stiffness of Guideways by Impact Test)

This study discuss the dynamic stiffness of guideways of a ultra-precision machine tools.V-V roller guideways have been employed in ultra-precision machine tools, as they can provide very smooth motion and good straightness. Recently, general linear ball guideways are also employed in ultra-precision machine tools. In the design of the machines, it is necessary to obtain the stiffness of these guideways. Therefore an identification method of the guideway stiffness is verified in this paper. In this method, the guideway stiffness is identified from the natural frequency of the moving body. First, the impact test is carried out for an ultra-precision machine tool to obtain the vibration mode of its moving body. Next, a simple vibration model is developed based on the obtained vibration mode to identify the equivalent stiffness of the guideways. Then, the static stiffness of the guideways is measured for the verification of the identified equivalent stiffness. For further verification, natural frequencies of the moving body are calculated by FEM with the identified equivalent stiffness and compared with the measured natural frequencies. The identified equivalent stiffness agreed well with the measured static stiffness. Furthermore, the natural frequencies were calculated almost correctly with the identified equivalent stiffness.

An air-bearing displacement sensor for nanometrology of surface forms

This paper presents the experimental investigations for performance evaluation of an air-bearing displacement sensor as a measurement system for nanometrology of surface forms by using it. The experimental configuration and some considerations for the air-bearing displacement sensor are described. Then, in order to identify the basic performance of the sensor, a measuring force and displacement output of the sensor are evaluated on a vibration isolated table. The sensor is also mounted on a diamond turning machine to evaluate the surface form of micro structures. A roll workpiece with Ni-P plating surface, on which micro-lens array are fabricated by using a FS-FTS (Force sensor fast tool servo) on the machine tool, is employed as a specimen for measurement.

Dynamic Response of an Air-Bearing Displacement Sensor for on-Machine Surface Form Measurement

This paper presents the dynamic response of an air-bearing displacement sensor for on-machine surface form measurement of micro structures. The on-machine measurement system has some merits in terms of measurement efficiency and re-machining for error compensation after measurement. On the other hand, the performance of the contact type measurement system based on stylus methods is dominated by the dynamic characteristics of the system because the system is subject to random vibrations of the machine tool including the spindle during measurement. Therefore, the dynamic response of the system is useful for analyzing the mechanical vibrations of the practical on-machine measurement system. In this paper, the equation of motion for the air-bearing displacement sensor to the excited input displacement is derived and the displacement behavior of the system by using a PZT actuator is investigated within certain frequency ranges experimentally for identifying the dynamics of the system.