Masahiko Yoshino

Rapid fabrication of an ordered nano-dot array by the combination of nano-plastic forming and annealing methods

In this paper, a new fabrication method for an ordered nano-dot array is developed. Combination of coating, nano-plastic forming and annealing processes is studied to produce uniformly sized and ordered gold nano-dot array on a quartz glass substrate. The experimental results reveal that patterning of a groove grid on the gold-coated substrate with NPF is effective to obtain the ordered gold nano-dot array. In the proposed fabrication process, the size of the gold nano-dot can be controlled by adjusting the groove grid size. A minimum gold nano-dot array fabricated on a quartz-glass substrate was 93 nm in diameter and 100 nm in pitch. Furthermore, the mechanism of nano-dot array generation by the presented process is investigated. Using a theoretical model it is revealed that the proposed method is capable of fabrication of smaller nano-dots than 10 nm by controlling process conditions adequately.

Nano/micro structure fabrication of metal surfaces using the combination of nano plastic forming, coating and roller imprinting processes

The fabrication technique using the combination of nano plastic forming, coating and roller imprinting processes to transfer nano/micro patterns onto the surface of metallic materials is developed. In this process, nano plastic forming (NPF) of pure aluminum (Al 99%) using a diamond tool is combined with a coating technique to produce a nickel die. The nickel die is then used for the double plate roller imprinting process to transfer the pattern onto the surface of metallic material. Experimental works with 0.1 N to 1.0 N indentation load variations and 2.5 µm to 7.5 µm pitch variations using a knife edge diamond tool are conducted to study the feasibility of this technique. Comparisons between the master mold, nickel die and rolling result in terms of geometries show good agreement, thus validating the proposed approach for high throughput, low cost, low emission and flexible fabrication technique. The capability of the proposed method is demonstrated in the fabrication of cross, net and brick patterns.

High Throughput Method to Fabricate Ordered Nano Dot Array on Various Plastic Films

In this paper, we propose a high throughput method to fabricate ordered metal nano dot array on a plastic film by combination of patterning by nano plastic forming, coating, annealing, and transferring to a plastic film. The effects of process parameters such as indentation load, annealing temperature on the formation of gold nano dot array and dot transfer ratio to a PDMS film are investigated. The results show that an ordered gold nano dot array is successfully formed on the pre-patterned substrate. The transfer of an ordered gold nano dot array to PDMS film is demonstrated.

A New Process to Fabricate Three Dimensional Ordered Nano Dot Array Structures by Nano Plastic Forming and Dewetting

Three dimensional (3D) nano/quantum dot array structures have attracted more and more attention due to their broad applications. A new fabrication method of multilayer ordered nano dot array with low cost and high throughput is developed in this paper. This process is combination of Top-down and Bottom-up approaches: Nano Plastic Forming (NPF) patterning of metal layer coated on the substrate as Top-down approach and self-organization by dewetting as Bottom-up approach. Effects of process conditions on 3D nano-dot array formation are studied experimentally. Regularity and uniformity of first layer nano-dot array is transferred to the second layer nano-dots by optimizing thickness of the spacer layer and Au coating layer. Multilayer ordered nano dot array structures with good alignment are obtained by repeating coating and annealing processes.

MPF-FDTD Simulations of Fabrication and Optical Analysis of Ordered Gold Nano-Dots Array

Recently, the authors have proposed a hybrid fabrication method of an ordered gold nano-dots array using a combination of the nano plastic forming and thermal annealing. In this study, in order to investigate morphology and optical properties of the gold nano-dots array fabricated by the proposed method, we develop a coupled three-dimensional simulation model by using the multi-phase-field method and the finite-difference-time-domain method. The simulation results demonstrate that the ordered gold nano-dots array which can be obtained by the proposed method exhibits quite characteristic optical responses due to the localized surface plasmon resonance.

21502 Static Recrystallization Behavior in Single Crystal Induced by Micro Plastic Forming

Abstract: This paper reports static recrystallization behavior in single crystal copper induced by micro plastic forming. Micro plastic forming tests of single crystal copper specimens were conducted by using a knife edge tool made of diamond. The formed specimens were annealed in the Ar gas atmosphere under various annealing temperatures and times. The microstructure in the micro-formed specimen and recrystallized grains in the annealed specimens were analyzed by SEM-EBSD. Through the experiments, relationship of crystal deformation by micro plastic forming and early stage of recrystallization in the single crystal copper is revealed. Furthermore, effects of annealing temperature and time on the recrystallization behavior are discussed.