Masahiro Muro
Panasonic
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Publication
Featured researches published by Masahiro Muro.
Japanese Journal of Applied Physics | 1996
Kazuhiro Yamashita; Masahiro Muro; Satoshi Kobayashi; Akiko Katsuyama; Masayuki Endo
An overlay accuracy measurement technique has been devised using the latent image on a chemically amplified resist developed in-house. A latent image with step height of over 0.1 µ m was formed after KrF excimer laser irradiation. It has been confirmed that it is possible to measure overlay accuracy using this latent image with measurement accuracy within 10 nm. This technique is very useful for overlay accuracy measurement of an exposure system using a double exposure method with a chemically amplified resist. It has been verified that heterodyne holographic wafer alignment (HHWA) has the capability to detect a latent image with shallow step height. Overlay accuracy within 60 nm was obtained using overlay error correction with this developed overlay accuracy measurement technique.
Archive | 1995
Kazuhiro Yamashita; Masahiro Muro
Archive | 1997
Takao Inoue; Takeshi Masaki; Taiziro Yosioka; Masahiro Muro
Archive | 2002
Shinichi Shimakawa; Masahiro Muro; Takuya Satoh; Takayuki Negami
Archive | 2010
Naoki Suzuki; Takao Nagumo; Hidehiro Yoshida; Hiroshi Hayata; Masahiro Muro
Archive | 2010
Yoshio Kanata; Masahiro Muro
Archive | 1995
Masahiro Muro; Takeshi Masaki; Yoshihiro Ikemoto; Yoshinori Furusawa
Archive | 2004
Masakazu Hiraishi; Masahiro Muro; Takeshi Masaki; Toshihiko Wada
Archive | 2015
Masashi Goto; Takayuki Miyoshi; Masahiro Muro
Archive | 2015
Masashi Goto; Takayuki Miyoshi; Masahiro Muro