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Dive into the research topics where Masaki Kuzumoto is active.

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Featured researches published by Masaki Kuzumoto.


IEEE Journal of Quantum Electronics | 1990

Fast axial flow CO/sub 2/ laser excited by silent discharge

Masaki Kuzumoto; Shuji Ogawa; Masaaki Tanaka; Shigenori Yagi

A fast axial flow CO/sub 2/ laser excited by silent discharge has been developed. With a new electrode system applied to the laser, homogeneous discharge of power density of up to 80 W/cm/sup 3/ is obtained without applying any stabilization techniques on the discharge. An output laser power of 920 W in stable TEM/sub 00/ mode operation is attained with an efficiency of over 14%. Beam fluctuation common to fast axial flow lasers is suppressed by the combination of smooth gas flow and low CO/sub 2/ molar fraction. >


Journal of Physics D | 1989

Role of N2 gas in a transverse-flow CW CO2 laser excited by silent discharge

Masaki Kuzumoto; Shuji Ogawa; Shigenori Yagi

Experimental and theoretical investigations have been carried out on the effect of N2 gas in a transverse-flow CO2 laser excited by silent discharge (SD). It has been found that the addition of N2 is a cause of the increase of excitation efficiency compensating the effect of the increase in reduced electric field strength E/N. The excitation efficiency expressed as a function of N2 gas concentration agrees qualitatively with the results of a Boltzmann equation analysis in which the electric field is assumed to be temporally stationary and spatially uniform. The decrease in gain coefficient with N2 concentration is explained well by a model in which the stream of excited molecules due to transverse flow of gas is taken into account. The optimum gas composition for SD excitation is found to be a mixture of CO2-CO-N2-He=8-4-60-28. The optimum molar fraction of N2 is extremely high in comparison to those values reported for other types of discharge excitation.


IEEE Journal of Quantum Electronics | 1989

Silent-discharge excited TEM/sub 00/ 2.5 kW CO/sub 2/ laser

K. Yasui; Masaki Kuzumoto; Shuji Ogawa; Masaaki Tanaka; Shigenori Yagi

The performance characteristics of the TEM/sub 00/ 2.5-kW silent-discharge-excited, transverse-flow CO/sub 2/ laser are presented. The silent-discharge excitation is advantageous for a high-quality beam pattern and for pulsed operation and sealed-off operation. Furthermore, the discharge power can be easily increased without limitation due to the instability of the discharge itself. >


Archive | 1993

Laser system with transverse mode selecting output coupler

Yushi Takenaka; Masaki Kuzumoto; Kenji Yoshizawa; Takashi Yamamoto; Masato Matsubara; Junichi Nishimae; Koji Yasui; Akihiro Otani


Archive | 2000

Method for removing photoresist film and apparatus used therefor

Seiji Noda; Masaki Kuzumoto; Izumi Oya; Makoto Miyamoto


Archive | 1989

Laser device with high oscillation efficiency

Shigenori Yagi; Yasuhito Myoi; Masaki Kuzumoto; Kazuki Kuba; Yoshito Seiwa; Toshitaka Aoyagi; Yutaka Mihashi


Archive | 2002

Apparatus for removing photoresist film

Izumi Oya; Seiji Noda; Makoto Miyamoto; Masaki Kuzumoto; Masashi Ohmori; Tatsuo Kataoka


Archive | 2000

Method of removing photoresist film

Izumi Oya; Seiji Noda; Makoto Miyamoto; Masaki Kuzumoto; Masashi Ohmori; Tatsuo Kataoka


Archive | 1993

Laser apparatus having a rectangular section

Masaki Kuzumoto; Yushi Takenaka; Junichi Nishimae; Kenji Yoshizawa; Takashi Yamamoto


Archive | 2006

Silent discharge plasma apparatus

Noboru Wada; Masaki Kuzumoto; Hajime Nakatani; Hiroyuki Igehara; Norimitsu Esaki; Shingo Mine; Taichiro Tamida

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