Is this you? Create Your Porfile
Avatar

Masami Ohtani

Network

Latest external collaboration on country level. Dive into details by clicking on the dots.

Explore More

Hotspot

Dive into the research topics where Masami Ohtani is active.

Explore More

Publication

Featured researches published by Masami Ohtani.

Archive | 1992

Substrate holding apparatus of a simple structure for holding a rotating substrate, and a substrate processing apparatus including the substrate holding apparatus

Yoshiteru Fukutomi; Masami Ohtani; Yasushi Nakamura

Archive | 1997

Treating solution supplying method and substrate treating apparatus

Masami Ohtani; Yoshiteru Fukutomi

Archive | 1993

Interface apparatus for transporting substrates between substrate processing apparatus

Masami Ohtani; Yoshiji Oka; Takeo Okamoto; Yoshiteru Fukutomi

Archive | 2008

SUBSTRATE PROCESSING APPARATUS WITH HIGH THROUGHPUT DEVELOPMENT UNITS

Yoshiteru Fukutomi; Masami Ohtani

Archive | 2008

SUBSTRATE PROCESSING APPARATUS INCLUDING A SUBSTRATE REVERSING REGION

Yoshiteru Fukutomi; Masami Ohtani

Archive | 2008

Substrate processing apparatus with integrated cleaning unit

Yoshiteru Fukutomi; Masami Ohtani

Archive | 1992

Substrat-Transport-Vorrichtung

Yoshiteru Fukutomi; Masami Ohtani; Takeo Okamoto

Archive | 1992

Substrat-Transport-Vorrichtung A substrate transport device

Yoshiteru Fukutomi; Masami Ohtani; Takeo Okamoto

Archive | 1991

Interface device for transporting substrates between processing devices.

Masami Ohtani; Yoshiji Oka; Takeo Okamoto; Yoshiteru Fukutomi

Archive | 1991

Schnittstellenvorrichtung zum Transportieren von Substraten zwischen Verarbeitungsgeräten. Interface device for transporting substrates between processing devices.

Masami Ohtani; Yoshiji Oka; Takeo Okamoto; Yoshiteru Fukutomi

Explore More

Collaboration

Dive into the Masami Ohtani's collaboration.

Explore More
Researchain Logo
Decentralizing Knowledge