Masanao Tani

A two-axis piezoelectric tilting micromirror with a newly developed PZT-meandering actuator

In this paper, we propose a new mechanical design of piezoelectric unimorph actuator that generate large static deflection angle by accumulating angular displacement in a cascaded piezoelectric cantilever formed in a meandering shape. The new actuator design was adopted in a double-gimbal two-dimensional optical scanner of a 4 mm times 6 mm foot print. The scanner delivered a relatively large static angle of mechanical plusmn8.6deg at an applied voltage of 20 Vdc at a non-resonant operation.

PIEZOELECTRIC 2D-OPTICAL MICRO SCANNERS WITH PZT THICK FILMS

ABSTRACT A piezoelectric 2D-optical micro scanner was fabricated with PZT thick-film actuators prepared using Arc Discharge Reactive Ion-Plating method. Two orthogonal pairs of unimorph actuators were used to compose a double-gimbal structure. The inner and outer actuators were controlled independently. A large elliptical mirror (1 mm × 2 mm) was scanned two-dimensionally. The scanner showed large optical scan angles of 23 degrees (4.3 kHz for X-scan) by 52 degrees (90.3 Hz for Y-scan) at low driving voltages of typical 10–20 V AC with a 5 V dc offset. The frequency ratio provided 47 scanning lines. Using the 2D scanner, we demonstrated laser image-projection of some characteristics.

A Combination of Fast Resonant Mode and Slow Static Deflection of SOI-PZT Actuators for MEMS Image Projection Display

A new type of MEMS optical scanner for image projection display has been developed by using the ADRIP (arc discharge reactive ion plating) technique of PZT piezoelectric material on an SOI wafer. Stable and wide range 2D scan was made possible by combining resonant motion for the fast horizontal axis (11.2 kHz, optical 39 degrees) and quasi-static operation for the slow vertical axis (DC ~60 Hz, optical 29 degrees) operated at 40 Vpp voltage

A laser display using a PZT-actuated 2D optical scanner

We report an image projection display using a MEMS 2D optical scanner driven by the PZT unimorph actuators developed by the ADRIP method. Improved contrast ratio of optical scan speeds with relatively large angles (horizontal: optical 27 degrees at 16.4 kHz, vertical: optical 31 degrees at 77.4 Hz, frequency ratio of 210) has made it possible to project monotone bitmap animations

Texture-control of lead zirconate titanate films for actuator applications

A combination of the preparation technique for ferroelectric films such as lead zirconate titanate (PZT) and the micromachining of Si is considered to be an effective way to fabricate piezoelectric microdevices like microactuators called a microelectromechanical system (MEMS). However, the amount of the displacement and force of PZT thin films is not sufficient in some applications of microactuators. To achieve the property of large displacement, increase of the film thickness or improvement of the piezoelectric property is required. One of the techniques to improve the ferroelectric and piezoelectric properties is assumed to be the arrangement of the polarization direction using a texture control process. We successfully preparaed the (100) and (111) dominant oriented Pb(Zr1-xTix)O3 thin films using a chemical solution deposition (CSD) process. On the other hand, an arc-discharged reactive ion-plating (ADRIP) method is one of the candidates to fabricate the thick PZT films because of high deposition rate such as 3 μm/h. In this work, the texture-controlled PZT thin and thick films deposited onto Pt/Ti/SiO2/Si substrates were prepared using CSD or ADRIP process for actuator applications. In the case of ADRIP process, (100) and (111) dominant oriented PZT thick films was formed onto CSD derived and texture controlled PZT thin film layer.