Masanori Matsuda

Electron Tunneling through Chemical Oxide of Silicon

Carrier transport between gold and n+-Si through chemical oxides of Si was measured for the first time using an atomic force microscope with a conducting probe. It was found from the theoretical calculation of carrier transport in 0.7-nm-thick chemical oxide formed in a mixed solution of H2SO4 and H2O2 that the carrier transport can be explained as a direct tunneling of electrons through chemical oxide.

Electron tunneling through chemical oxide of silicon

Abstract Carrier transport between gold and n + -Si through chemical oxide of Si was measured using an atomic force microscope with a conducting probe. A direct evidence for the effect of SiH bonds on the electron tunneling current was obtained.

Effect of chemical preoxidation treatment on the structure of SiO2Si interfaces

Abstract The effects of chemical preoxidation treatments on the oxidation reaction at SiO 2 Si(111) interfaces were investigated using XPS. In the case of preoxidation treatment in a mixed solution of H2SO4 and H2O2 the layer-by-layer oxidation reaction occurs at the interface as in the case of the preoxidation treatment in dry oxygen at 300°C. The effect of chemical preoxidation treatment in a hot solution of HNO3 and that in a mixed solution of HCl and H2O2 on the oxidation reaction at the interface were also investigated.

Surface fluorination of electrophotographic photoreceptors by plasma treatment for contact charging with a wet polymer roller

Abstract In order to increase the hydrophobicity of an organic photoreceptor (OPC) surface for contact charging with a wet polymer roller, surface fluorination treatment was carried out on OPC drums using CF4 rf plasma, and the charging characteristics and surface properties were examined. The hydrophobicity of the plasma-treated OPC drum surface was evaluated by measuring the water contact angle and the water extinction time due to evaporation. It was confirmed that the hydrophobicity of the OPC drum surface was improved considerably by the plasma treatment with little influence on the contact charging characteristics. XPS analysis indicated that fluorine was introduced into the OPC surface by the plasma treatment and its fraction increased with an increase in the treatment time. Further, the XPS spectra suggested that CF, CF2 and CF3 bonds existed on the plasma-treated OPC surface.