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Masao Kosugi

Canon Inc.

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Publication

Featured researches published by Masao Kosugi.

Archive | 1989

Alignment and exposure apparatus and method for manufacture of integrated circuits

Naoki Ayata; Mitsugu Yamamura; Bunei Hamasaki; Masao Kosugi; Kazuo Takahashi; Mitsuaki Seki

Archive | 1986

Container for a sheet-like article

Masao Kosugi; Kazuo Iizuka

Archive | 1989

Step-and-repeat alignment and exposure method and apparatus

Kazuo Takahashi; Masao Kosugi

Archive | 1989

Step and repeat exposure apparatus having improved system for aligning

Masao Kosugi

Archive | 1984

Disc orienting device

Masao Kosugi

Archive | 1989

Observation system for a projection exposure apparatus

Akiyoshi Suzuki; Hideki Ina; Masao Kosugi

Archive | 1986

Mask storing mechanism

Kazuo Iizuka; Yukio Tokuda; Masao Kosugi

Archive | 1986

Device for adjusting projection magnification

Masao Kosugi; Ichiro Kano

Archive | 1986

Method and apparatus for processing a plate-like workpiece

Masao Kosugi; Yukio Tokuda

Archive | 1983

Transfer apparatus provided with an auto-focusing mechanism

Hiroshi Sato; Shuichi Yabu; Masao Kosugi

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Collaboration

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Hiroshi Sato

Canon Inc.

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Kazuo Takahashi

Canon Inc.

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Akiyoshi Suzuki

Canon Inc.

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Shuichi Yabu

Canon Inc.

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Kazuo Iizuka

Canon Inc.

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Masaru Higuchi

Canon Inc.

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Naoki Ayata

Canon Inc.

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Tadashi Konuki

Canon Inc.

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Tetsuya Mori

Canon Inc.

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Mitsuaki Seki

Canon Inc.

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