Masaru Hori
Tokyo Electron
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Publication
Featured researches published by Masaru Hori.
232nd ECS Meeting (October 1-5, 2017), | 2017
Kazunori Shinoda; Nobuya Miyoshi; Hiroyuki Kobayashi; Masaru Kurihara; Masaru Izawa; Kenji Ishikawa; Masaru Hori
A highly selective, rapid thermal-cyclic atomic-level etching (ALE) process for SiNx film has been developed. The first step of this process is exposing SiNx to hydrofluorocarbon plasma to form an (NH4)2SiF6 layer on the SiNx surface. The second step is rapid thermal annealing with an infrared (IR) irradiation to decompose and sublimate the (NH4)2SiF6 layer. Etching of SiNx was observed after the (NH4)2SiF6 layer was removed by thermal annealing. Cyclic etching tests were carried out by repeated plasma exposure and IR irradiation. It was found that the cyclic process is self-limiting because etching depth depends only on the cycle number and not on the plasma exposure time. A high selectivity over SiO2 and poly Si was confirmed. This paper reviews the novel isotropic ALE for nitride films focusing on the surface reaction mechanism investigated by x-ray photoelectron spectroscopy (XPS) and thermal desorption spectroscopy (TDS). Isotropic ALE of TiN was also demonstrated using the same approach.
Archive | 2007
Masaru Hori; Yoshiro Kabe; Toshihiko Shiozawa; Junichi Kitagawa
Archive | 2004
Toshio Goto; Masaru Hori; Nobuo Ishii; Shoji Den
Archive | 2013
Masaru Hori; Hiroyuki Kano
Archive | 2005
Mineo Hiramatsu; Masaru Hori; Hiroyuki Kano; Toru Sugiyama; 浩之 加納; 美根男 平松; 徹 杉山
Archive | 2004
Mineo Hiramatsu; Masaru Hori
Archive | 2005
Masaru Hori; Hiroyuki Kano; Yutaka Tokuda; 浩之 加納; 豊 徳田
Archive | 2011
Hitoshi Itoh; Hidenori Miyoshi; Masaru Hori; Hirotaka Toyoda; Makoto Sekine
Archive | 2004
Mineo Hiramatsu; Masaru Hori
Archive | 2010
Masafumi Ito; Norihiko Nishizawa; Masaru Hori; Toshio Goto; Hiroyuki Kano