Masaru Kadono

FeSiN films for a narrow track head

FeSiN films for a narrow track head have been studied, utilizing the ion beam reactive sputtering method. By controlling both nitrogen flow ratio and substrate temperature, the low-Si-content FeSiN films with (112) orientation were obtained. The magnetostriction was reduced by this orientation, and good soft magnetic properties appeared. The saturation magnetic flux density of the films was 1.7 T. The 7.5 /spl mu/m trackwidth FeSiN heads showed good recording and reproducing characteristics. >

Laminate magnetic heads with locally thickness modified thin film cores

Laminate magnetic heads with locally thickness modified cores, using electron-beam evaporated FeAlSi films, have been successfully developed. Experimental results support the numerical analyses indicating that these thickness modified cores enable magnetic heads to be more efficient than corresponding heads with uniform thickness cores. Both abrasive machining and anisotropic dry-etching, preferably activated by introducing oxygen, can easily modify the core thickness when they are combined with our head fabrication process characterized by the V-shape grooves. >