Publication


Featured researches published by Masashi Ohmori.


Archive | 1995

Semiconductor cleaning apparatus and wafer cassette

Masashi Ohmori; Hiroshi Tanaka; Akira Nishimoto; Hiroshi Sasai; Naohiko Fujino; Satoru Kotoh


Archive | 1994

Method for detecting and examining slightly irregular surface states, scanning probe microscope therefor, and method for fabricating a semiconductor device or a liquid crystal display device using these

Yoshitsugu Nakagawa; Fusami Soeda; Naohiko Fujino; Isamu Karino; Osamu Wada; Hiroshi Kurokawa; Koichiro Itami-shi Hori; Nobuyoshi Hattori; Masahiro Sekine; Masashi Ohmori; Kazuo Kuramoto; Junji Kobayashi


Archive | 2002

Apparatus for removing photoresist film

Izumi Oya; Seiji Noda; Makoto Miyamoto; Masaki Kuzumoto; Masashi Ohmori; Tatsuo Kataoka


Archive | 1992

Semiconductor processing apparatus and module

Yoshiaki Yamada; Junji Iwasaki; Masashi Ohmori


Archive | 2000

Method of removing photoresist film

Izumi Oya; Seiji Noda; Makoto Miyamoto; Masaki Kuzumoto; Masashi Ohmori; Tatsuo Kataoka


Archive | 1989

Apparatus for atmospheric chemical vapor deposition

Akihiro Washitani; Masashi Ohmori; Kouichirou Tsutahara; Toru Yamaguchi


Archive | 1994

Semiconductor device processing method

Yoshiaki Yamada; Junji Iwasaki; Masashi Ohmori


Archive | 1992

Substrate cleaner using ultrasonics - has inner container with substrate supported in cleaning chemicals within outer container of ultrasonic carrier medium

Masashi Ohmori; Satoru Kotoh; Shinji Nakajima


Archive | 1993

Semiconductor wafer cleaning appts. associated with prod. cassette - handles wafers set upright in portable rack for mechanised transport between isopropyl alcohol cleaning and drying stations

Masashi Ohmori; Hiroshi Tanaka; Akira Nishimoto; Hiroshi Sasai; Naohiko Fujino; Satoru Kotoh


Archive | 1994

Rastersondenmikroskop A scanning probe microscope

Yoshitsugu Nakagawa; Fusami Soeda; Naohiko Fujino; Isamu Karino; Osamu Wada; Hiroshi Kurokawa; Koichiro Itami-shi Hori; Nobuyoshi Hattori; Masahiro Sekine; Masashi Ohmori; Kazuo Kuramoto; Junji Kobayashi

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