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Masato Kumazawa

Nikon

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Publication

Featured researches published by Masato Kumazawa.

Archive | 2003

Exposure apparatus, optical projection apparatus and a method for adjusting the optical projection apparatus

Masashi Tanaka; Masato Kumazawa; Kinya Kato; Masaki Kato; Hiroshi Chiba; Hiroshi Shirasu

Archive | 2001

Condenser optical system and illumination optical apparatus provided with the optical system

Yutaka Suenaga; Kouichi Hiraga; Masato Kumazawa

Archive | 2008

PROJECTION OPTICAL SYSTEM, EXPOSURE APPARATUS, EXPOSURE METHOD, DISPLAY MANUFACTURING METHOD, MASK, AND MASK MANUFACTURING METHOD

Masato Kumazawa; Tatsuo Fukui

Archive | 2000

Exposure/imaging apparatus and method in which imaging characteristics of a projection optical system are adjusted

Masashi Tanaka; Masato Kumazawa; Kinya Kato; Masaki Kato; Hiroshi Chiba; Hiroshi Shirasu

Archive | 1998

Exposure apparatus and exposure method for transferring pattern onto a substrate

Masahi Tanaka; Masato Kumazawa; Kinya Kato; Masaki Kato; Hiroshi Chiba; Hiroshi Shirasu

Archive | 2007

Projection optical apparatus, exposure method and apparatus, photomask, and device and photomask manufacturing method

Masato Kumazawa; Michio Noboru

Archive | 2000

Aperture stop having central aperture region defined by a circular ARC and peripheral region with decreased width, and exposure apparatus and method

Masashi Tanaka; Masato Kumazawa; Kinya Kato

Archive | 2007

Projection optical apparatus, exposure method and device manufacturing method

Masato Kumazawa; Michio Noboru

Archive | 2010

Projection optical system, exposure device, exposure method, mask and display manufacturing method

Masato Kumazawa; Tatsuo Fukui

Archive | 2007

Systeme optique de projection, dispositif et procede d'exposition, procede de fabrication d'affichage, masque et procede de fabrication de masque

Masato Kumazawa; Tatsuo Fukui

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Collaboration

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Tatsuo Fukui

Nikon

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Kinya Kato

Nikon

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Hiroshi Chiba

Nikon

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Hiroshi Shirasu

Nikon

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Masaki Kato

Nikon

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Masashi Tanaka

Nikon

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Michio Noboru

Nikon

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Kouichi Hiraga

Nikon

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Masahi Tanaka

Nikon

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Yutaka Suenaga

Nikon

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