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Dive into the research topics where Mati Mikkor is active.

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Featured researches published by Mati Mikkor.


Journal of the Acoustical Society of America | 1991

Silicon accelerometer responsive to three orthogonal force components and method for fabricating

Mati Mikkor

An accelerometer fabricated from silicon which is responsive to the three orthogonal components of an applied force. A method is also disclosed for etching the accelerometer from a single silicon substrate. Three rectangular beams or cantilevers are formed each having vertical sidewalls lying in crystalline planes orthogonal to one another. Each of the beams is directly responsive to one of the three orthogonal force components.


Solid State Communications | 1972

Observation of electron standing waves in Mg by tunneling

R. C. Jaklevic; John Lambe; Mati Mikkor; W. C. Vassell

Abstract Electron standing wave states in Mg films are observed by electron tunneling measurements. An electron group velocity is determined by this experiment.


1975 Automotive Engineering Congress and Exposition | 1975

Some phenomena which control sulfuric acid emission from automotive catalysts

Robert Henry Hammerle; Mati Mikkor

With the use of a simulated exhaust system, the sulfuric acid and sulfur dioxide emission from a monolith noble- metal oxidation catalyst (Engelhard IIB) is measured. It was found that the storage rate of sulfur onto an initially sulfur-free catalyst decreases to a few percent of the sulfur rejection rate within 3-4 h. The amount of sulfur on the catalyst when the catalyst is in equilibrium with 20 ppm sulfur in the gas phase varies between 0.3 weight percent of the catalyst at about 400 degree C to 0.1 weight percent at 600 degree C. The sulfur can readily desorb from the catalyst if the gas phase sulfur content is lowered or if the catalyst temperature is increased. It was found that the conversion of sulfur dixoide to sulfuric acid reaches thermodynamic equilibrium at temperature of 400-500 degree C and space velocities of 30,000 H to the minus 1 power. These conditions correspond approximately to a small V8 engine at 20 mph cruise. In the simulated exhaust system without a catalyst, propylene, propane and hydrogen, which are present in automobile exhaust, reduce sulfuric acid to sulfur dioxide. This reduction appears to be a homogeneous reaction. /GMRL/


Archive | 1989

Electrically controllable valve etched from silicon substrates

Mati Mikkor


Archive | 1986

Method of making silicon capacitive pressure sensor with glass layer between silicon wafers

Mati Mikkor


Physical Review Letters | 1971

Observation of Electron Standing Waves in a Crystalline Box

R. C. Jaklevic; John Lambe; Mati Mikkor; W. C. Vassell


Archive | 1987

High temperature pressure sensor with low parasitic capacitance

Mati Mikkor


Archive | 1987

Hermetic sealing of silicon

Mati Mikkor


Archive | 1989

Method for fabricating a silicon force transducer

Mati Mikkor; Edward N. Sickafus


Archive | 1986

Silicon capacitive pressure sensor and method of making

Mati Mikkor

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