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Matthew Lipson

ASML Holding

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Publication

Featured researches published by Matthew Lipson.

Archive | 2005

Lithographic apparatus and method of manufacturing device

Johannes Jacobus Matheus Baselmans; Marcle Mathijs T M Dierichs; Johannes Christian Maria Jasper; Matthew Lipson; Erik Roelof Loopstra; Hendricus Johanne Maria Meijer; Uwe Mickan; Johannes Catharinus Hubertus Mulkens; Tammo Uitterdijk; ミカン ウヴェ; ロエロフ ロープシュトラ エリック; ウィッテルティユク タンモ; ヨハネ マリア マイヤー ヘンドリクス; リプソン マシュー; マシユス セオドア マリー ディーリヒス マルセル; キャサリヌス ヒュベルテュス ムルケンス ヨハネス; クリスティアーン マリア ヤスペル ヨハネス; ヤコブス マテウス バセルマンス ヨハネス

Archive | 2002

Method for protection of adhesives used to secure optics from ultra-violet light

Matthew Lipson; Ronald A. Wilklow

Archive | 2005

Lithographic apparatus and device manufacturing method utilizing placement of a patterning device at a pupil plane

Matthew Lipson; Azat M. Latypov

Archive | 2010

Side seal for wet lens elements

Matthew Lipson; Taras Shvets; Richard Joseph Bruls

Archive | 2005

Method of covering clear aperture of optic during deposition of glue protection layer

Matthew Lipson

Archive | 2004

System and method to block unwanted light reflecting from a pattern generating portion from reaching an object

Matthew Lipson; Christopher J. Mason; Justin L. Kreuzer

Archive | 2010

Bonding Silicon Silicon Carbide to Glass Ceramics

Matthew Lipson; Robert D. Harned; Geoffrey O'Connor; Timothy O'Neil

Archive | 2004

System and method to modify the spatial response of a pattern generator

Matthew Lipson; Ronald A. Wilklow

Journal of Photopolymer Science and Technology | 2007

Current Status of High-n Immersion Lithography Development

Harry Sewell; Jan Mulkens; Christian Wagner; Diane McCafferty; Louis Markoya; Matthew Lipson; Naundasiri Samarakone

Archive | 2007

Apparatus to Modify the Spatial Response of a Pattern Generator

Matthew Lipson; Ronald A. Wilklow

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