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Matthias Fleischer

Bosch

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Publication

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Archive | 2014

High-NA Interferometrical Stylus for Free Form Surface Measurement in Optical and Automotive Industry

Matthias Fleischer; Gerald Franz; Pawel Drabarek

In optical and automotive industry, there are many measurement applications with a need for high resolutions in the nanometer range under shop floor conditions. These are typical applications for interferometrical methods. Very often, the surface under test has a cylindrical or conical shape, so that the typical camera based flat wavefront interferometer has to be replaced by an optical stylus applied to a form measuring device.

Archive | 2006

Coupling device for a light guide

Pawel Drabarek; Jochen Straehle; Stefan Franz; Matthias Fleischer; Ralf Kochendoerfer; David Rychtarik; Jan Fischer

Archive | 2008

Vorrichtung und Verfahren zur Formmessung von Freiform-Flächen

Ralf Kochendoerfer; Pawel Drabarek; Matthias Fleischer

Archive | 2011

Device for measuring thickness of e.g. wafer, has measuring unit arranged on side of another measuring unit, and evaluating device for associating measured values of measuring units to compute thickness of part to be measured

Matthias Fleischer; Gerald Franz

Archive | 2010

Device and method for compensating optical path difference of interferometric measuring device

Matthias Fleischer; Stefan Franz

Archive | 2009

Interferometric system and method for adjusting a path difference

Matthias Fleischer; Thomas Seiffert

Archive | 2007

Device for coupling beam controls of optical systems for transferring beams between the systems used in interferometric measuring devices comprise a connecting unit and mechanical centering units arranged on the optical systems

Pawel Drabarek; Jochen Strähle; Stefan Franz; Matthias Fleischer; Ralf Kochendörfer; David Rychtarik; Jan Fischer

Archive | 2006

Interferometric measuring device for e.g. optical distance measurement in quality control, has reference and modulation interferometers, and dispersive optical component that is arranged in one of optical paths of reference interferometer

Pawel Drabarek; Matthias Fleischer; Stefan Franz

Archive | 2011

SYSTEM FOR ALIGNING A MEASURED OBJECT RELATIVE TO A DETECTOR, INTERFEROMETRIC SYSTEM AS WELL AS ALIGNMENT METHOD

Matthias Fleischer

Archive | 2009

OFFICIAL SYSTEM FOR ILLUMINATING A MEASURED OBJECT AND INTERFEROMETRIC SYSTEM FOR MEASURING SURFACES OF A MEASURED OBJECT

Matthias Fleischer; Pawel Drabarek

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Collaboration

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Pawel Drabarek

Bosch

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Stefan Franz

Bosch

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Ralf Kochendoerfer

Bosch

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Thomas Seiffert

Bosch

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Gerald Franz

Bosch

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David Rychtarik

Bosch

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Jan Fischer

Bosch

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Armin Witte

Bosch

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Daniel Supp

Bosch

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Jochen Straehle

Bosch

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