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Publication
Featured researches published by Matthias Kramer.
Proceedings of SPIE, the International Society for Optical Engineering | 2000
Rainer Paetzel; Hans Stephen Albrecht; Vadim Berger; Igor Bragin; Matthias Kramer; Juergen Kleinschmidt; Marcus Serwazi
We have developed a KrF excimer laser with ultra narrow linewidth and high repetition rate applicable for optical lithography using DUV wafer scanners with highest numerical aperture (NA) of more than 0.8. A laser bandwidth of less than 0.4 pm, full width half maximum, is achieved by our new design of the laser resonator, which is based on out patented polarization coupled resonator. The new resonator design increase the efficiency of ht laser optics and improves the wavelength stability. The laser tube and solid sate pulser have been adapted to the new laser resonator. As a result, another step in the reduction of the cost of operation is achieved. The laser operates with a repetition rate of 2 kHz and gives a large operation range with respect to wavelength and energy range. The characteristic performance of this new excimer laser is presented.
Archive | 2001
Peter Heist; Matthias Kramer; Juergen Kleinschmidt; Sergei V. Govorkov; Marcus Serwazi; Thomas Jünemann
Archive | 2001
Matthias Kramer; Marcus Serwazi
Archive | 2001
Dirk Basting; Wolfgang Zschocke; Thomas Schroeder; Juergen Kleinschmidt; Matthias Kramer; Uwe Stamm
Archive | 2002
Hans-Stephan Albrecht; Matthias Kramer; Marcus Serwazi; Thomas Schroeder; Stefan Niedermeier
Archive | 2002
Matthias Kramer; Günter Nowinski; Juergen Kleinschmidt; Marcus Serwazi
Archive | 2002
Kay Zimmermann; Konstantin Aab; Matthias Kramer; Marcus Serwazi
Archive | 2000
Juergen Kleinschmidt; Peter Heist; Matthias Kramer
Archive | 2001
Dirk Basting; Wolfgang Zschocke; Thomas Schroeder; Jürgen Dr. Kleinschmidt; Matthias Kramer; Uwe Stamm
Archive | 2001
Dirk Basting; Wolfgang Zschocke; Thomas Schroeder; Juergen Kleinschmidt; Matthias Kramer; Uwe Stamm