Publication


Featured researches published by Mehran Behdjat.


Archive | 2008

Temperature measurement and control of wafer support in thermal processing chamber

Khurshed Sorabji; Alexander N. Lerner; Joseph M. Ranish; Aaron Muir Hunter; Bruce E. Adams; Mehran Behdjat; Rajesh S. Ramanujam


Archive | 2005

Thermal oxidation of silicon using ozone

Yoshitaka Yokota; Sundar Ramamurthy; Vedapuram S. Achutharaman; Cory Czarnik; Mehran Behdjat; Christopher S. Olsen


Archive | 2008

Thermal reactor with improved gas flow distribution

Ming-Kuei (Michael) Tseng; Norman L. Tam; Yoshitaka Yokota; Agus Tjandra; Robert Navasca; Mehran Behdjat; Sundar Ramamurthy; Kedarnath Sangam; Alexander N. Lerner


Archive | 2009

High temperature vacuum chuck assembly

Alexander N. Lerner; Blake Koelmel; Mehran Behdjat


Archive | 2011

Water cooled gas injector

Yoshitaka Yokota; Sundar Ramamurthy; Vedapuram S. Achutharaman; Cory Czarnik; Mehran Behdjat; Christopher S. Olsen


Archive | 2006

Method of Thermally Oxidizing Silicon Using Ozone

Yoshitaka Yokota; Sundar Ramamurthy; Vedapuram S. Achutharaman; Cory Czarnik; Mehran Behdjat; Christopher S. Olsen


Archive | 2012

Particle control in laser processing systems

Aaron Muir Hunter; Mehran Behdjat; Bruce E. Adams


Archive | 2007

LIFT PIN FOR SUBSTRATE PROCESSING

Alexander N. Lerner; Mehran Behdjat; Paula Valdivia


Archive | 2014

Support cylinder for thermal processing chamber

Mehran Behdjat; Aaron Muir Hunter; Joseph M. Ranish; Norman L. Tam; Jeffrey Tobin; Jiping Li; Martin Tran


Archive | 2014

APPARATUS FOR REDUCING THE EFFECT OF CONTAMINATION ON A RAPID THERMAL PROCESS

Aaron Miller; Mehran Behdjat; Norman L. Tam; Michael Liu

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