Michael Albiez

Particle beam systems and methods

Particle beam system

Particle beam apparatus having an aperture unit and method for setting a beam current in a particle beam apparatus

Method for processing a digital gray value image

Inspection method, particle beam system and manufacturing method

Method and device for examining a surface of an object

Focusing and positioning device for a particle-optical raster microscope

Method for examining surface of object using particle beam of particle beam device, involves arranging object in sample chamber, and supplying particle beam to predetermined location on surface of object

Aperture unit for a particle beam device

Teilchenstrahlgerät mit einer Blendeneinheit und Verfahren zur Einstellung eines Strahlstroms in einem Teilchenstrahlgerät