Michael Brauer

Silicon microphone based on surface and bulk micromachining

In this paper a silicon microphone which can be fabricated using standard semiconductor processes is presented. The acoustic-electrical transducer is based on the capacitance change of a movable 400 nm thin poly-silicon membrane with different diameters (800-1200 µm). A source follower was integrated to transform the impedance. The complete chip is 2×2×0.5 mm3 in size. The sensitivity achieved is in the range of 0.4 to 3.2 mV Pa-1.

Advanced Pressure Sensors with high Flexibility for Side Crash Detection

The implementation of advanced regulations for side impact crash tests require an improved and faster detection method for side impact crashes. Therefore the sensing principle must recognize the severeness of an accident with highest possible confidence and within shortest time. The use of pressure sensors inside a door cavity enables the system supplier to develop solutions to fulfill these requirements. Infineons 3rd generation of pressure sensors for side crash detection offers a high flexibility to implement customer specific communication protocols. Furthermore, proven diagnosis functionality as well as additionally new features are integrated to guarantee a high reliability of the sensors for this special safety application. All active components for the entire pressure satellite could be integrated within the sensor.