Michael Christopher Kautzky
Seagate Technology
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Featured researches published by Michael Christopher Kautzky.
IEEE Transactions on Magnetics | 2008
Michael Christopher Kautzky; Alexandre V. Demtchouk; Yonghua Chen; Kelly M. Brown; Shaun Eric McKinlay; Jianhua Xue
Al2O3 films made with atomic layer deposition (ALD) have been developed for use as isolation layers in CPP tunneling magnetoresistive readers. A low-temperature deposition process was developed to permit integration with a self-aligned patterning scheme. The resulting films show excellent thickness uniformity (<2% within-wafer), leakage current density (Jleak<1times10-18 A/cm2) and breakdown properties (Fbd>9 MV/cm). TEMs of sub-100 nm TMR readers fabricated using these processes show>95% conformality on junction sidewalls, indicating nonselective growth of ALD Al2O3 on the various stack and bottom shield surfaces. Permanent magnets with well-controlled junction grain structure and coercivities in excess of 2500 Oe have been deposited with existing processes. FEM modeling shows the effective stabilizing field from the magnets at the junction edge scales inversely with ALD layer thickness, in agreement with device-level free layer stability metrics showing improvements at lower ALD thicknesses. As the conformal ALD layer thickness is easily tuned, this technology provides flexibility in trading off reader amplitude and stability that should support scaling of the abutted TMR design out to 1 Tb/in2 and beyond.
Journal of Vacuum Science and Technology | 2015
Pengyi Zhang; Shaista Babar; John R. Abelson; Sarbeswar Sahoo; Meng Zhu; Michael Christopher Kautzky; Luke M. Davis; Gregory S. Girolami
Dense, smooth, and high-purity FexCo(1−x) thin films have been grown by chemical vapor deposition using a coflow of Fe(CO)5 and Co2(CO)8 precursors. High precursor fluxes and precise control over both the substrate temperature and relative precursor pressures are keys to reproducibly obtaining high quality films with the desired stoichiometry. Films with the composition Fe0.55Co0.45 show excellent soft magnetic properties: the saturation magnetization of 2.45 ± 0.05 T approaches the theoretical maximum, and the coercivity is less than 20 Oe. Conformal films have also been grown successfully in a trench structure with an aspect ratio of 4:1.
Archive | 2013
Jie Zou; Kaizhong Gao; William Albert Challener; Mark Ostrowski; Venkateswara Rao Inturi; Tong Zhao; Michael Christopher Kautzky
Archive | 2013
Meng Zhu; Tong Zhao; Steven C. Riemer; Michael Christopher Kautzky
Archive | 2013
Tong Zhao; Michael Christopher Kautzky; Amit Vasant Itagi; Michael Allen Seigler
Archive | 2011
Xiaoyue Huang; Michael Christopher Kautzky; Amit Vasant Itagi; William Albert Challener; Michael Allen Seigler
Archive | 2012
Xiaoyue Huang; Michael Christopher Kautzky; Zoran Jandric
Archive | 2013
Tong Zhao; Sarbeswar Sahoo; Michael Christopher Kautzky; Amit Vasant Itagi
Archive | 2013
Jie Zou; Kaizhong Gao; William Albert Challener; Mark Ostrowski; Venkateswara Rao Inturi; Tong Zhao; Michael Christopher Kautzky
Archive | 2003
Jie Zou; Jason Bryce Gadbois; Declan Macken; Michael Christopher Kautzky; David C. Seets; Ladislav R. Pust