Michael Foster

Systems and methods for detecting out-of-plane linear acceleration with a closed loop linear drive accelerometer

Mechanical isolation for mems devices

SENSOR WITH POSITION-INDEPENDENT DRIVE ELECTRODES IN MULTI-LAYER SILICON ON INSULATOR SUBSTRATE

Integrated die level isolation for a mems device

Z offset MEMS device

Mitigation of high stress areas in vertically offset structures

Systems and methods for reduced stress anchors

Z OFFSET MEMS DEVICES AND METHODS

OUT-OF-PLANE COMB-DRIVE ACCELEROMETER

Edge-mounted sensor