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Michael Hentschel

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Publication

Featured researches published by Michael Hentschel.

Archive | 2009

TRANSPORTING DEVICE FOR A VACUUM PROCESSING APPARATUS, DRIVE DEVICE FOR A COMPONENT OF A VACUUM PROCESSING APPARATUS, AND A VACUUM PROCESSING APPARATUS

Hubertus von der Waydbrink; Udo Willkommen; Michael Hentschel; Marco Kenne

Archive | 2010

Gas separation arrangement comprises vacuum coating system designed as longitudinally extended flow through system

Hans-Christian Hecht; Michael Hentschel; Matthias Klooss; Stanley Rehn; Johannes Strümpfel; Andrej Wolf

Archive | 2009

Optical sensor for use in coating system i.e. physical vapor deposition system, has nozzle attached to optical receiver for directing gas flow to receiver, and optical transmitter for transmitting optical signal

Michael Hentschel; Daniel Stange; Marco Kenne; Hubertus von der Waydbrink; Siegfried Scheibe

Archive | 2010

Substrate treatment system comprises system chamber comprising inlet lock before output lock and transportation device for transportation of substrates from inlet lock to output lock within system chamber, and heating device

Michael Hentschel; Matthias Klooss; Smolke Matthias; Strümpfel Johannes; Andrej Wolf

Archive | 2009

Verfahren und Vorrichtung zur Erzeugung und Bearbeitung von Schichten auf Substraten unter definierter Prozessatmosphäre

Hubertus von der Waydbrink; Michael Hentschel; Marco Kenne; Andrej Wolf

Archive | 2009

Transport roller for vacuum treating e.g. coating, substrate e.g. architecture glass, has covering element covering lateral surface of roller body and detachably fastened on lateral surface of roller body

Michael Hentschel; Hubertus von der Waydbrink; Jochen Krause; Marco Kenne

Archive | 2008

Filtereinrichtung für Vakuumpumpen

Jeff Pemberville Coan; Michael Hentschel; Marco Kenne; James G. Perrysburg Koedam; Claus Liebsch; Hubertus von der Waydbrink; Andrej Wolf

Archive | 2008

METHOD AND DEVICE FOR PRODUCING AND PROCESSING LAYERS OF SUBSTRATES UNDER A DEFINED PROCESSING ATMOSPHERE

Hubertus Von Der Waydbrink; Michael Hentschel; Marco Kenne; Andrej Wolf

Archive | 2010

Transportvorrichtung für eine Vakuumprozessanlage, Antriebseinrichtung für eine Anlagenkomponente einer Vakuumprozessanlage, und Vakuumprozessanlage

Hubertus von der Waydbrink; Udo Willkommen; Michael Hentschel; Marco Kenne

Archive | 2009

Drive unit for transport device of vacuum processing system, has traction element guided around two deflecting rollers, where traction element comprises continuous stainless steel strip

Michael Hentschel; Marco Kenne; Hubertus von der Waydbrink; Udo Willkommen

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