Michael Hentschel

TRANSPORTING DEVICE FOR A VACUUM PROCESSING APPARATUS, DRIVE DEVICE FOR A COMPONENT OF A VACUUM PROCESSING APPARATUS, AND A VACUUM PROCESSING APPARATUS

Gas separation arrangement comprises vacuum coating system designed as longitudinally extended flow through system

Optical sensor for use in coating system i.e. physical vapor deposition system, has nozzle attached to optical receiver for directing gas flow to receiver, and optical transmitter for transmitting optical signal

Substrate treatment system comprises system chamber comprising inlet lock before output lock and transportation device for transportation of substrates from inlet lock to output lock within system chamber, and heating device

Verfahren und Vorrichtung zur Erzeugung und Bearbeitung von Schichten auf Substraten unter definierter Prozessatmosphäre

Transport roller for vacuum treating e.g. coating, substrate e.g. architecture glass, has covering element covering lateral surface of roller body and detachably fastened on lateral surface of roller body

Filtereinrichtung für Vakuumpumpen

METHOD AND DEVICE FOR PRODUCING AND PROCESSING LAYERS OF SUBSTRATES UNDER A DEFINED PROCESSING ATMOSPHERE

Transportvorrichtung für eine Vakuumprozessanlage, Antriebseinrichtung für eine Anlagenkomponente einer Vakuumprozessanlage, und Vakuumprozessanlage

Drive unit for transport device of vacuum processing system, has traction element guided around two deflecting rollers, where traction element comprises continuous stainless steel strip