Michael Junghaehnel | Researchain

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Archive | 1996

Sputter coating to produce carbon layer for e.g. magnetic heads

Torsten Winkler; Michael Junghaehnel; Klaus Goedicke; Peter Frach; Manfred Mueller; Friedel Haese; Harald Dr Strecker; Dieter W Meyer

Archive | 1999

Thin film disk with barrier layer

Heinz Baur; Ralf Bluethner; Hans Buchberger; Klaus Goedicke; Michael Junghaehnel; Karl-Heinz Lehnert; Manfred Mueller; Hans-Herrman Schneider; Torsten Winkler

Archive | 2000

Procedure for pulse-shaped energy supply in magnetron discharges has after application of voltage, firing of magnetron discharge determined and then separation of voltage source from electrodes of magnetron arrangement

Klaus Goedicke; Torsten Winkler; Michael Junghaehnel; Karsten Handt; Henry Gueldner; Henrik Wolf; Frank Eckholz

Archive | 1998

Circuit for supplying electrical energy to plasma can feed high power to unipolar or bipolar pulsed plasma with switching region in range 20 to 100 kHz with conventional IGBT switch

Michael Junghaehnel; Karsten Handt; Klaus Goedicke

Archive | 2000

Verfahren und Schaltungsanordnung zur pulsförmigen Energieeinspeisung in Magnetronentladungen

Klaus Goedicke; Torsten Winkler; Michael Junghaehnel; Karsten Handt; Henry Gueldner; Henrik Wolf; Frank Eckholz

Archive | 2000

Production of a thin layer system comprises introducing power into the plasma in the form of a controlled number of pulses during deposition of extremely thin layers; and adjusting the average power during the pulse-one time

Torsten Winkler; Klaus Goedicke; Ralf Bluethner; Michael Junghaehnel; Hans Buchberger; Manfred Mueller; Arno Hebgen; Hans-Hermann Schneider

Archive | 2000

Verfahren und Schaltungsanordnung zur pulsförmigen Energieeinspeisung in Magnetronentladungen Method and circuit arrangement for pulsed power supply in magnetron

Klaus Goedicke; Torsten Winkler; Michael Junghaehnel; Karsten Handt; Henry Gueldner; Henrik Wolf; Frank Eckholz

Archive | 2000

Method and circuit arrangement for pulsed energy supply to magnetron

Klaus Goedicke; Torsten Winkler; Michael Junghaehnel; Karsten Handt; Henry Gueldner; Henrik Wolf; Frank Eckholz

Archive | 1999

PRODUCTION OF THIN FILM MAGNETIC DISK

Heinz Baur; Ralf Bluethner; Hans Buchberger; Klaus Goedicke; Michael Junghaehnel; Karl-Heinz Lehnert; Manfred Mueller; Hans-Hermann Schneider; Torsten Winkler; カール・ハインツ・レーネルト; クラウス・ゲーディッケ; トルステン・ヴィンクラー; ハインツ・バウア; ハンス・ブーフバーガー; ハンスーヘルマン・シュナイダ; マンフレッド・ミュラー; ミカエル・コンクヘーネル; ラルフ・ブリュートナー

Archive | 1999