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Michael Muehlbeyer

Carl Zeiss AG

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Archive | 2004

Apparatus for manipulation of an optical element

Michael Muehlbeyer; Johannes Lippert

Archive | 2002

Imaging device in a projection exposure facility

Wolfgang Hummel; Juergen Fischer; Karl-Eugen Aubele; Erich Merz; Raoul Reiner; Klaus Rief; Stefan Schoengart; Markus Neumaier; Baerbel Trossbach; Ulrich Weber; Michael Muehlbeyer; Hubert Holderer; Alexander Kohl; Jochen Weber; Johannes Lippert; Thorsten Rassel

Archive | 2002

System for damping oscillations

Franz Sorg; Stefan Xalter; Frank Melzer; Bernhard Gellrich; Michael Muehlbeyer

Archive | 2009

Device consisting of at least one optical element

Yim-Bun Patrick Kwan; Michael Muehlbeyer; Johannes Lippert

Archive | 2003

Diaphragm changing device

Hermann Bieg; Thomas Bischoff; Uy-Liem Nguyen; Stefan Xalter; Marcus Will; Yim-Bun Patrick Kwan; Michael Muehlbeyer

Archive | 2001

Oscillation damping system

Franz Sorg; Stefan Xalter; Michael Muehlbeyer; Bernhard Gellrich; Frank Melzer; Thomas Ittner

Archive | 2002

Optical system with a plurality of optical elements

Albrecht Hof; Guenter Maul; Michael Muehlbeyer; Klaus Mehlkopp

Archive | 2000

Optical imaging device, in particular lens system, with at least one system diaphragm

Karl-Heinz Schuster; Thomas Bischoff; Bernhard Gellrich; Michael Muehlbeyer; Guenter Maul

Archive | 2001

System zur gezielten Deformation von optischen Elementen

Frank Melzer; Michael Muehlbeyer; Bernhard Gellrich; Franz Sorg; Stefan Xalter; Thomas Ittner

Archive | 2003

Method for the targeted deformation of an optical element

Jean Noel Fehr; Johannes Lippert; Steffen Fritzsche; Michael Muehlbeyer; Harald Kirchner

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