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Michael R. Oliver

Wilmington University

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Publication

Featured researches published by Michael R. Oliver.

Archive | 2000

Composition and method for polishing a composite of silica and silicon nitride

Sharath D. Hosali; Anantha R. Sethuraman; Jiun-Fang Wang; Lee Melbourne Cook; Michael R. Oliver

Archive | 1998

Fixed abrasive polishing system for the manufacture of semiconductor devices, memory disks and the like

David B. James; William D. Budinger; John V. H. Roberts; Michael R. Oliver; Nina G. Chechik; Richard M. Levering; Heinz F. Reinhardt

Archive | 1999

Polishing system having a multi-phase polishing substrate and methods relating thereto

David B. James; William D. Budinger; John V. H. Roberts; Michael R. Oliver; Nina G. Chechik; Richard M. Levering; Lee Melbourne Cook

Journal of Colloid and Interface Science | 2006

AFM study of forces between silica, silicon nitride and polyurethane pads

Igor M. Sokolov; Quy K. Ong; Hasan Shodiev; Nina G. Chechik; David B. James; Michael R. Oliver

Archive | 1998

Manufacturing a memory disk or semiconductor device using an abrasive polishing system, and polishing pad

David B. James; William D. Budinger; John V. H. Roberts; Michael R. Oliver; Nina G. Chechik; Richard M. Levering; Heinz F. Reinhardt

Archive | 2000

Method relating to a polishing system having a multi-phase polishing layer

David B. James; William D. Budinger; John V. H. Roberts; Michael R. Oliver; Nina G. Chechik; Richard M. Levering; Lee Melbourne Cook

Archive | 2000

Apparatus and methods for chemical-mechanical polishing of semiconductor wafers

Lee Melbourne Cook; David B. James; William D. Budinger; John V. H. Roberts; Michael R. Oliver; Nina G. Chechik; Richard M. Levering

Archive | 2001

Methods for chemical-mechanical polishing of semiconductor wafers

Michael R. Oliver

Archive | 1999

Method of polishing substrates comprising silicon dioxide and composition relating thereto

Michael R. Oliver

Archive | 2001

Chemical mechanical polishing of dielectric materials

Michael R. Oliver; Lee Melbourne Cook

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Hasan Shodiev

Clarkson University

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Igor M. Sokolov

Tufts University

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Quy K. Ong

Clarkson University

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