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Dive into the research topics where Michael Stelzl is active.

Publication


Featured researches published by Michael Stelzl.


Archive | 2010

METHOD AND DEVICE FOR DETECTING CRACKS IN SEMICONDUCTOR SUBSTRATES

Andreas Ortner; Klaus Gerstner; Hilmar von Campe; Michael Stelzl


Archive | 2010

Method and device for generating digital still pictures of wafer-shaped elements during a production process

Michael Stelzl


Archive | 2013

Beleuchtungsvorrichtung, Inspektionsvorrichtung und Inspektionsverfahren für die optische Prüfung eines Objekts

Michael Stelzl; Andreas Ortner


Archive | 2005

Method for Measuring Topographic Structures on Devices

Michael Stelzl; Volker Seidemann; Jürgen Leib; Ha-Duong Ngo


Archive | 2014

APPARATUS AND METHOD FOR IDENTIFYING DEFECTS WITHIN THE VOLUME OF A TRANSPARENT SHEET AND USE OF THE APPARATUS

Bruno Schrader; Frank Macherey; Holger Wegener; Michael Stelzl


Progress in Photovoltaics | 2013

‘Edge-light’: combination of sensitive crack detection and luminescence measurements

Andreas Ortner; O. Gräff; Michael Stelzl; Frank Macherey; R. Neubecker


Archive | 2013

Vorrichtung und Verfahren zum Erkennen von Fehlstellen innerhalb des Volumens einer ltransparenten Scheibe und Verwendung der Vorrichtung

Frank Macherey; Holger Wegener; Michael Stelzl; Bruno Schrader


Archive | 2012

Illuminating device, inspection device and inspection method for the optical examination of an object

Michael Stelzl; Andreas Ortner


Archive | 2015

Verfahren und Vorrichtung zur Detektion von Oberflächendeformationen

Michael Stelzl; Ralph Neubecker; Karsten Mayr; Sven Hauf


Archive | 2014

Verfahren und Vorrichtung zur Detektion von Oberflächendeformationen Method and apparatus for detection of surface deformations

Michael Stelzl; Ralph Neubecker; Karsten Mayr; Sven Hauf

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Katrin Hoffmann

Bundesanstalt für Materialforschung und -prüfung

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Ute Resch-Genger

Bundesanstalt für Materialforschung und -prüfung

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