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Michal Urbánek

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Publication

Featured researches published by Michal Urbánek.

Archive | 2012

E-Beam Pattern Generator BS600 and Technology Zoom

Vladimír Kolařík; Miroslav Horáček; František Matějka; Milan Matějka; Michal Urbánek; Stanislav Krátký; Stanislav Král; Jan Bok

Microscopy and Microanalysis | 2015

PEC Reliability in 3D E-beam DOE Nanopatterning.

Stanislav Krátký; Michal Urbánek; Vladimír Kolařík

Archive | 2012

Shaped e-beam nanopatterning with proximity effect correction

Michal Urbánek; Vladimír Kolařík; Milan Matějka; František Matějka; Jan Bok; Petr Mikšík; Jan Vašina

Microelectronic Engineering | 2016

Measurements of current density distribution in shaped e-beam writers

Jan Bok; Miroslav Horáček; Vladimír Kolařík; Michal Urbánek; Milan Matjěka; Vladislav Krzyránek

Archive | 2013

Variable shape E-beam writing: proximity effect simulation and correctionof binary and relief structures

Michal Urbánek; Milan Matějka; Vladimír Kolařík; Miroslav Horáček; Stanislav Krátký; Jan Bok; Jana Chlumská; Petr Mikšík; Jan Vašina

Archive | 2012

CALIBRATION SPECIMENS FOR MICROSCOPY

Vladimír Kolařík; Milan Matějka; František Matějka; Stanislav Krátký; Michal Urbánek; Miroslav Horáček; Stanislav Král; Jan Bok

Archive | 2012

Vladimír KOLAŘÍK, Miroslav HORÁČEK, František MATĚJKA, Milan MATĚJKA,

Michal Urbánek; Stanislav Krátký; Stanislav Král; Jan Bok

Archive | 2011

SCANNING PROBE MICROSCOPY: MEASURING ON HARD SURFACES

Milan Matějka; Michal Urbánek

Archive | 2010

Determination of proximity effect forward scattering rangeparameter in E-beam lithography.

Michal Urbánek; Vladimír Kolařík; Stanislav Král; Marie Dvořáková

Archive | 2009

Technologie zápisu elektronovým svazkem proměnné velikosti 66 - 2100 nm.

Vladimír Kolařík; František Matějka; Miroslav Horáček; Bohumila Lencová; Milan Matějka; Stanislav Král; Michal Urbánek; Petr Mikšík; Jan Vašina; Radek Horák

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Collaboration

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Bohumila Lencová

Brno University of Technology

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Tomáš Radlička

Masaryk University

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