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Michiaki Sano

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Publication

Featured researches published by Michiaki Sano.

Archive | 2007

Mask blank and photomask

Masaru Mitsui; Michiaki Sano

Archive | 2007

Manufacturing method for four-gradation photomask, and photomask blank

Michiaki Sano; 道明 佐野

Archive | 2004

Gray tone mask and method for manufacturing gray tone mask

Michiaki Sano; 道明 佐野

Archive | 2006

Manufacturing method for gray tone mask

Michiaki Sano; 道明 佐野

Archive | 2007

GRAY TONE MASK BLANK AND METHOD FOR MANUFACTURING THE SAME, METHOD FOR MANUFACTURING GRAY TONE MASK AND GRAY TONE MASK, AND PATTERN TRANSFER METHOD

Kazuhisa Imura; Yasuki Kimura; Masaru Mitsui; Michiaki Sano; 勝 三井; 和久 井村; 道明 佐野; 泰樹 木村

Archive | 2006

Method for manufacturing gray tone mask, gray tone mask, and gray tone mask blank

Masaru Mitsui; Michiaki Sano; 勝 三井; 道明 佐野

Archive | 2006

Mask blank, photomask, and method for manufacturing same

Masaru Mitsui; Michiaki Sano; Masao Ushida; 勝 三井; 道明 佐野; 正男 牛田

Archive | 2007

Pattern forming method and manufacturing method for gray tone mask

Shuho Motomura; Michiaki Sano; 道明 佐野; 秀峰 元村

Archive | 2006

Gray tone mask blank and photomask

Masaru Mitsui; Michiaki Sano; 勝 三井; 道明 佐野

Archive | 2008

Multi-gradation photomask, manufacturing method thereof, and pattern transfer method

Michiaki Sano; 道明 佐野

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Collaboration

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Masaru Mitsui

Hoya Corporation

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Junichi Tanaka

Komatsu Limited

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Masao Ushida

Hoya Corporation

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