Mikko Ritala | Researchain

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Featured researches published by Mikko Ritala.

Archive | 2001

In: Handbook of Thin Film Materials

Mikko Ritala; Markku Leskelä

Archive | 2002

Method for preparing metal nitride thin films

Markku Leskelä; Mikko Ritala; Petra Alen; Marika Juppo

Archive | 2000

Method of growing oxide thin film

Kaupo Kukli; Markku Leskelae; Antti Rahtu; Mikko Ritala; ラーツアンッティ; ククリカウポ; レスケレマルック; リタラミッコ

Archive | 2006

Organometallic Precursors and Related Intermediates for Deposition Processes, Their Production and Methods of Use

ü Thenappan; Chien-Wei Li; David Nalewajek; Martin E. Cheney; Jingyu Lao; Eric Eisenbraun; Min Li; Nathaniel Berliner; Mikko Ritala; Markku Leskelä; Kaupo Kukli; Linda Cheney

Archive | 2005

Oxide films containing titanium

Antti Rahtu; Raija Matero; Markku Leskelä; Mikko Ritala; Timo Hatanpää; Timo S. Hänninen; Marko Vehkamäki

Meeting Abstracts | 2006

Scale-up of the BaTiO3 ALD Process onto 200 mm Wafer

Raija Matero; Antti Rahtu; Suvi Haukka; Marko Tuominen; Marko Vehkamäki; Timo Hatanpää; Mikko Ritala; Markku Leskelä

Archive | 2016

A METHOD OF PRODUCING SOFC CATHODE DIFFUSION BARRIER LAYER AND A SOFC

Enn Öunpuu; Juhan Subbi; Sanni Seppälä; Jaakko Niinistö; Markku Leskelä; Mikko Ritala

Archive | 2001

METHOD OF DEPOSITING YTTRIUM OXIDE AND LANTHANUM OXIDE THIN FILMS

Niskanen Antti; Niinisto Jaakko; Markku Leskelä; Raisanen Petri; Matti Putkonen; Mikko Ritala; ニスカネンアンッティ; ニイニストジャーッコ; ライサネンペトリ; プトコネンマッティ; レスケラマルック; リタラミッコ

Archive | 2012