Publication


Featured researches published by Minekazu Sakai.


Archive | 2011

Semiconductor physical quantity sensor

Minekazu Sakai; Minoru Murata


Archive | 2001

Method for manufacturing semiconductor dynamic quantity sensor

Hiroshi Muto; Tsuyoshi Fukada; Masakazu Terada; Hiroshige Sugito; Masakazu Kanosue; Shinji Yoshihara; Shoji Ozoe; Seiji Fujino; Minekazu Sakai; Minoru Murata; Yukihiro Takeuchi; Seiki Aoyama; Toshio Yamamoto; Kazushi Asami


Archive | 1987

Method of fabricating a semiconductor pressure sensor

Tetsuo Fujii; Susumu Kuroyanagi; Akira Kuroyanagi; Tomohiro Funahashi; Minekazu Sakai; Shinji Yoshihara


Archive | 1999

Semiconductor device with a protective sheet to affix a semiconductor chip

Shinji Yoshihara; Sumitomo Inomata; Kinya Atsumi; Minekazu Sakai; Yasuki Kariya Shimoyama; Tetsuo Fujii


Archive | 1998

Semiconductor physical quantity sensor with stopper portion

Seiichiro Ishio; Minekazu Sakai; Kenichi Ao


Archive | 1999

Semiconductor dynamical quantity sensor device having electrodes in Rahmen structure

Minekazu Sakai; Yukihiro Takeuchi; Kazuhiko Kano; Seiji Fujino; Tsuyoshi Fukada; Hiroshige Sugito; Minoru Murata; Hiroshi Muto; Hirofumi Higuchi; Kenichi Ao


Archive | 1999

Semiconductor physical quantity sensor and production method thereof

Nobuyuki Kato; Toshimasa Yamamoto; Tsuyoshi Fukada; Minekazu Sakai


Archive | 1999

Acceleration sensor with ring-shaped movable electrode

Kazuhiko Kano; Koji Hattori; Yoshinori Ohtsuka; Makiko Sugiura; Minekazu Sakai; Inao Toyoda; Yasutoshi Suzuki; Seiichiro Ishio; Minoru Murata


Archive | 1998

Semiconductor substrate manufacturing method, semiconductor pressure sensor and manufacturing method thereof

Minekazu Sakai; Toshimasa Yamamoto; Yasutoshi Suzuki; Kenichi Yokoyama; Masakazu Terada; Eishi Kawasaki; Inao Toyoda


Archive | 2001

Semiconductor dynamic quantity sensor for detecting dynamic quantity in two axes with X-shaped mass portion

Minekazu Sakai

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