Mingyu Liu

Estimation of measurement uncertainty caused by surface gradient for a white light interferometer

Although the scanning white light interferometer can provide measurement results with subnanometer resolution, the measurement accuracy is far from perfect. The surface roughness and surface gradient have significant influence on the measurement uncertainty since the corresponding height differences within a single CCD pixel cannot be resolved. This paper presents an uncertainty estimation method for estimating the measurement uncertainty due to the surface gradient of the workpiece. The method is developed based on the mathematical expression of an uncertainty estimation model which is derived and verified through a series of experiments. The results show that there is a notable similarity between the predicted uncertainty from the uncertainty estimation model and the experimental measurement uncertainty, which demonstrates the effectiveness of the method. With the establishment of the proposed uncertainty estimation method, the uncertainty associated with the measurement result can be determined conveniently.

Modeling and Simulation of a Machining Process Chain for the Precision Manufacture of Polar Microstructure

This paper presents a functional microstructured surface, named Polar Microstructure. Polar microstructure is a three dimensional (3D) structured surface possessing a pattern of distribution of latitude and longitude micro-topographies with geometrical characteristics, which is similar to that in the Earth’s north or south pole. The spacing of its small surface features can achieve form accuracy at the micrometer level. Polar microstructure has great potential for applications in precision measurement of angle displacement based on the characteristics of its surface features. This paper presents the development of a machining process chain system that integrates single point diamond turning (SPDT) and diamond broaching together to fabricate polar microstructure. A framework of a machining process chain system is presented which is composed of input module, design module, simulation module, output module, and metrology module. After that, modeling of the machining process chain composed of SPDT and diamond broaching is built up. The model takes into consideration the initial surface topography of the workpiece. Simulations have been conducted to obtain the optimal machining parameters in each machining process. A series of experiments was conducted for the ultra-precision machining of various types of polar microstructures. The machining results show that the machining process chain system is technically feasible and effective in the precision manufacturing of polar microstructure. The experimental results agree well with the simulated results.

Fluid jet-array parallel machining of optical microstructure array surfaces

Optical microstructure array surfaces such as micro-lens array surface, micro-groove array surface etc., are being used in more and more optical products, depending on its ability to produce a unique or particular performance. The geometrical complexity of the optical microstructures array surfaces makes them difficult to be fabricated. In this paper, a novel method named fluid jet-array parallel machining (FJAPM) is proposed to provide a new way to generate the microstructure array surfaces with high productivity. In this process, an array of abrasive water jets is pumped out of a nozzle, and each fluid jet simultaneously impinges the target surface to implement material removal independently. The jet-array nozzle was optimally designed firstly to diminish the effect of jet interference based on the experimental investigation on the 2-Jet nozzles with different jet intervals. The material removal and surface generation models were built and validated through the comparison of simulation and experimental results of the generation of several kinds of microstructure array surfaces. Following that, the effect of some factors in the process was discussed, including the fluid pressure, nozzle geometry, tool path, and dwell time. The experimental results and analysis prove that FJAPM process is an effective way to fabricate the optical microstructure array surface together with high productivity.

Fiducial-aided on-machine positioning method for precision manufacturing of optical freeform surfaces

There are still significant challenges in the accurate positioning of optical freeform surfaces on the machine tool and the measurement instrument due to the high accuracy requirement and their complex shapes. This paper proposes a Fiducial-aided On-machine Positioning method (FAOPM) that combines on-machine measurement and off-machine measurement to precisely position optical freeform surfaces during the precision manufacturing cycle including rough machining, fine machining, measurement, and error compensation. The FAOPM makes use of fiducials which are firstly measured on a coordinate measuring machine with nanometric accuracy to generate a Fiducial-aided Computer Aided Design (FA-CAD) of the designed optical surface, then the developed on-machine measuring device obtains the accurate positions of the fiducials after remounting in the machining coordinate system. Finally the relative position of the workpiece is identified so that the associated cutting paths and compensation tool path can be easily generated. Several optical freeform surfaces were experimentally machined to prove the capability of the proposed method. The results indicate that the positions of the workpiece during the precision manufacturing and measurement cycle were precisely achieved and the form accuracy of the optical freeform surfaces was remarkable improved based on the FAOPM.

Fiducial-Aided Robust Positioning of Optical Freeform Surfaces

Form characterization of a machined optical freeform surface demands accurate alignment of the sampled measured data points on the machined surface, and they are compared with the designed geometry of the surface through positioning. In this paper, a fiducial-aided robust positioning method (FAPM) is developed which attempts to evaluate freeform surfaces with high efficiency and precision. The FAPM method makes use of fiducials as reference datum to form a fiducial-aided computer-aided design (FA-CAD) of the freeform surface which not only establishes an inherent surface feature, but also links the different coordinate systems among design coordinate frame, machine tool, and measurement instrument. To verify the capability of the proposed method, a series of experiments were conducted. Compared with the traditional freeform measurement method (e.g., least squares method), the results indicate that the robustness and accuracy of the measurement is significantly enhanced by the FAPM.

Fluid jet-array parallel machining of optical microstructure array surfaces: publisher’s note

This publishers note amends the funding section of [Opt. Express 25, 22710 (2017)].

Multi-sensor data fusion for measurement of complex freeform surfaces

Along with the rapid development of the science and technology in fields such as space optics, multi-scale enriched freeform surfaces are widely used to enhance the performance of the optical systems in both functionality and size reduction. Multi-sensor technology is considered as one of the promising methods to measure and characterize these surfaces at multiple scales. This paper presents a multi-sensor data fusion based measurement method to purposely extract the geometric information of the components with different scales which is used to establish a holistic geometry of the surface via data fusion. To address the key problems of multi-sensor data fusion, an intrinsic feature pattern based surface registration method is developed to transform the measured datasets to a common coordinate frame. Gaussian zero-order regression filter is then used to separate each measured data in different scales, and the datasets are fused based on an edge intensity data fusion algorithm within the same wavelength. The fused data at different scales is then merged to form a new surface with holistic multiscale information. Experimental study is presented to verify the effectiveness of the proposed method.