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Dive into the research topics where Mingzhe Liu is active.

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Featured researches published by Mingzhe Liu.


international conference on electronic measurement and instruments | 2009

Research on deterministic communication of industrial wireless based on WLAN

Yangbo Zheng; Aidong Xu; Yan Song; Wei Zhao; Mingzhe Liu

The shortages of WLAN applied to the field of industrial control are given by analyzing the communication mechanism of WLAN. In this article, it presents a new communication method with deterministic scheduler in order to satisfy requirement of industrial wireless communication. It selects beacon interval as communication macro cycle, and pre-selects a station as the coordinated station that is responsible for the maintenance accurate clock synchronization function within the BSA. In data link layer, packets from user layer are divided into periodic packets and non-periodic packets. In terms of devices configured information beforehand, the periodic packets would be sent by fixed time clock, while the non-periodic packets would be sent when it is polled by the coordinated station, herein, we selected polling algorithm with good performance in the aspect of adaptive. This is called deterministic scheduling. The deterministic scheduling mechanism put forward in this paper provides foundation for applying WLAN to the field of industrial control, and its deterministic communication methods is compatible with other commercial WLAN well.


international conference on communications | 2009

Industrial wireless deterministic communication based on WLAN: Design, implementation and analysis

Yangbo Zheng; Aidong Xu; Yan Song; Wei Zhao; Mingzhe Liu

In this article, it presents the status of wireless communication being applied in industrial environment, and points out its deterministic communication issue existed in control network. According to this issue, a kind of industrial wireless deterministic communication mechanism and method based on WLAN is put forward. Afterwards, the main part is to describe the process of design, implementation and test programs. Depending on test results, some analysis is set out to indicate that the parameters performance of IWLAN with deterministic scheduling mechanism is better than commercial WLAN. At the end of this article, simulation result is supplied as the reference of actual IWLAN parameters performance.


world congress on intelligent control and automation | 2008

Research of control system platform technology for IC equipment

Mingzhe Liu; Aidong Xu; Haibin Yu; Hong Wang

With the development of road to 300 mm semiconductor wafer manufacturing, IC equipment control system not only implement its task scheduling, material transfer and process control, we must also consider the enterprise information integration, production scheduling and industry standards. This paper analyzes the semiconductor manufacturing process, control requirements, and presents a framework-style, modular IC equipment control system platform model, aimed at the complete system control functions at the same time, making the control of the semiconductor equipment greater flexibility, scalability, enterprise-class interactive capabilities, and in accordance with industry standards.


international conference on software engineering | 2013

Research of material transfer software platform in IC equipment controlling system

Yanan Wang; Mingzhe Liu; Yuanfeng Liu

This paper researches and develops a material transfer software platform using in the semiconductor equipment controlling system, this platform is developed by offering unified interfaces and developing independent software modules according to the common demand of the manufactures, and is applied in an experimental platform, the result shows that the platform software can effectively improve users development efficiency, and has good application prospects.


world congress on intelligent control and automation | 2010

Research of Ethernet communication technology for motion control

Mingzhe Liu; Aidong Xu; Wei Zhao

For Ethernet-based motion control application, this paper analyze system function, system architecture, and performance requirements of motion control system, and proposed an improved Ethernet communication method. The method, which bases on the time slice and priority strategies, schedules data to be transmitted deterministically and meets the motion control real-time processing requirements without changing the fundamental communication mechanism of Ethernet. The final results of test verify the feasibility of Ethernet-based real-time control application for motion control.


Archive | 2009

Control method for plasma reinforced chemical meteorology deposition apparatus

Haibin Yu; Hong Wang; Yue Lin; Aidong Xu; Jianhui Zhou; Kai Kang; Mingzhe Liu; Hechun Hu


Archive | 2009

SECS communicating method based on SEMI standard

Haibin Yu; Hong Wang; Yue Lin; Aidong Xu; Jianhui Zhou; Kai Kang; Mingzhe Liu; Shuitao Wang


Archive | 2007

Wireless built-in controller based on automatic industrial Ethernet field bus

Haibin Yu; Zhongfeng Wang; Aidong Xu; Tong Zhuo; Mingzhe Liu; Caihong Tan


Archive | 2011

Implementation of Transmission and Control Platform for Equipment Front End Module of Semiconductor Production System

Haibin Yu; Aidong Xu; Jilong Zhang; Mingzhe Liu; Jingtao Hu; Zheng Li


Archive | 2008

Engineering machinery remote monitoring system conforming to global mobile communication standard

Aidong Xu; Zheng Li; Mingzhe Liu; Gang Shi; Zhanyuan Bai; Dong Zhou; Wei Sun

Collaboration


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Aidong Xu

Chinese Academy of Sciences

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Haibin Yu

Shenyang Institute of Automation

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Jilong Zhang

Shenyang Institute of Automation

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Hong Wang

Shenyang Institute of Automation

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Wei Zhao

Chinese Academy of Sciences

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Zheng Li

Shenyang Institute of Automation

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Qinning Liu

Chinese Academy of Sciences

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Yan Song

Shenyang Institute of Automation

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Yangbo Zheng

Shenyang Institute of Automation

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Feng Qiao

Shenyang Jianzhu University

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