Minori Shirota
National Institute of Advanced Industrial Science and Technology
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Publication
Featured researches published by Minori Shirota.
Physics of Fluids | 2008
Minori Shirota; Toshiyuki Sanada; Ayaka Sato; Masao Watanabe
The mechanism of a bubble production method using pulsed acoustic pressure waves in gas phase is investigated using high-speed photography. The acoustic characteristics of the present bubble generator are also investigated. We found out the optimal acoustic waveform for producing only one bubble per one action; the bubble detachment radius is accurately controlled by first applying the positive onset-assistance acoustic pressure wave and then the negative detachment-assistance acoustic pressure wave with an accurately controlled time lapse. From an orifice with a radius of 0.09mm submerged in water, bubbles with radii in the range of 0.28–0.78mm with an extremely small standard deviation of less than 1μm are obtained. The shrinking and pinch-off motions of a capillary bridge connecting the bubble and orifice at the time of bubble detachment are observed in detail. The balancing force on a growing bubble, which is based on a spherical bubble formation model is also estimated. As a result, we reveal that wh...
ASME/JSME 2007 5th Joint Fluids Engineering Conference | 2007
Toshiyuki Sanada; Minori Shirota; Masao Watanabe; Y. Morita; M. Yamase
A novel resist stripping and surface cleaning technique is proposed. We have improved wet vapor resist stripping technique (Ojima & Ohmi) using high-speed steam and purified water droplets mixture. Relatively low pressure steam (0.1MPa∼0.2MPa) is mixed with purified water in front of the nozzle, and sprayed to Si wafer with resist. Using this new technique, we are able to strip resist without chemicals very quickly and also to clean a wafer surface, i.e., to eliminate some particles. This technique has an advantage not only in reducing some processes of semiconductor manufacturing but also in maintaining chemical-free environment. Both droplet velocity and diameter distributions were measured by Phase Doppler Anemometer (PDA). Resist stripping was observed with a high-speed video camera and the fringes of the removed resist region were observed with a digital microscope. Mechanism of this resist stripping process is discussed.Copyright
Chemical Engineering Science | 2009
Toshiyuki Sanada; Ayaka Sato; Minori Shirota; Masao Watanabe
Chemical Engineering Science | 2007
Toshiyuki Sanada; Minori Shirota; Masao Watanabe
Fluid Dynamics Research | 2008
Toshiyuki Sanada; Keiji Sugihara; Minori Shirota; Masao Watanabe
Fluid Dynamics Research | 2008
Toshiyuki Sanada; Masao Watanabe; Minori Shirota; Masao Yamase; Takayuki Saito
Journal of Fluid Science and Technology | 2008
Minori Shirota; Tomohiro Imamura; Masaharu Kameda
Kagaku Kogaku Ronbunshu | 2007
Keiji Sugihara; Toshiyuki Sanada; Minori Shirota; Masao Watanabe
Transactions of the Japan Society of Mechanical Engineers. B | 2007
Minori Shirota; Toshiyuki Sanada; Yasuhiro Arata; Masao Watanabe; Masaharu Kameda
Transactions of the Japan Society of Mechanical Engineers. B | 2006
Minori Shirota; Tomohiro Imamura; Masaharu Kameda
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National Institute of Advanced Industrial Science and Technology
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