Mitsuhiro Shikida
Hitachi
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Featured researches published by Mitsuhiro Shikida.
IEEE\/ASME Journal of Microelectromechanical Systems | 1994
Mitsuhiro Shikida; Kazuo Sato; Shinji Tanaka; Yoshio Kawamura; Yoshihisa Fujisaki
The characteristics of a gas valve driven by electrostatic force are investigated. The gas valve consists of a pair of planar electrodes with a conductive film between them. Three valve ports pass through the electrode plates. The film is elastically bent in an S-shape in the middle and the S-bend moves back and forth as voltage is alternately applied between the film and each electrode. This valve has a high conductance achieved by large vertical film displacement. The valve is suitable for rarefied gas control systems, such as the molecular beam epitaxy (MBE) apparatus, which requires a gas flow rate on the order of 1 sccm under a low pressure of less than 100 Pa. Experimental models of the gas valve are constructed to investigate the valves operation. The maximum pressure difference the valve can handle depends on the applied voltage and the size of the port orifice. A valve with 2.0 mm inlet and outlet ports can work under the operating condition of the MBE apparatus. >
Archive | 1992
Mitsuhiro Shikida; Kazuo Sato; Yoshio Kawamura; Shinji Tanaka; Yasuaki Horiuchi; Akira Koide; Toshimitsu Miyada
Archive | 2012
Mitsuhiro Shikida; Kazuo Sato; Hiroyuki Honda; Kohta Inouchi
Archive | 1993
Kazuo Sato; Mitsuhiro Shikida; Shigeo Ohashi; Toshio Hatada; Noriyuki Ashiwake; Shinji Tanaka; Takeshi Harada; Yukio Honda
Archive | 1994
Kenji Akiba; Kazuo Sato; Mitsuhiro Shikida; Naoto Uetsuka; 尚登 上塚; 佐藤 一雄; 光宏 式田; 健次 秋葉
Archive | 1994
Kazuo Sato; Mitsuhiro Shikida; 佐藤 一雄; 光宏 式田
Archive | 1994
Toshio Hatada; Shigeo Ohashi; Kazuo Sato; Mitsuhiro Shikida; Shinji Tanaka; 佐藤 一雄; 繁男 大橋; 光宏 式田; 伸司 田中; 敏夫 畑田
Archive | 2008
Masataka Araogi; Tokuo Chiba; Susumu Ichihara; Nobuyuki Kasama; Kenji Kato; Yasuyuki Mitsuoka; Kunio Nakajima; Takashi Niwa; Kazuo Sato; Mitsuhiro Shikida; 邦雄 中島; 佐藤 一雄; 靖幸 光岡; 健二 加藤; 徳男 千葉; 進 市原; 光宏 式田; 正隆 新荻; 隆 新輪; 宣行 笠間
Archive | 2017
Yuki Nabekura; Hitoshi Fukuyu; Yoshihiro Hasegawa; Mitsuhiro Shikida
The Proceedings of Conference of Tokai Branch | 2016
Sora Muramatsu; Koji Iwano; Yasuhiko Sakai; Yasumasa Ito; Mitsuhiro Shikida