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Miyata Akira

Tokyo Electron

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Publication

Featured researches published by Miyata Akira.

Archive | 2009

Coating/developing device, operation method of coating/developing device, and storage medium

Kaneko Tomohiro; Miyata Akira

Archive | 2009

WORKPIECE PROCESSING SYSTEM, WORKPIECE PROCESSING METHOD, EXPOSURE APPARATUS, EXPOSURE METHOD, COATER/DEVELOPER, COATING/DEVELOPING METHOD AND DEVICE MANUFACTURING METHOD

Kumazaki Kiyoaki; Fujima Toshihisa; Kaneko Tomohiro; Miyata Akira

Archive | 2007

Substrate recovery method and substrate processing apparatus

Higashi Makio; Miyata Akira; Hara Yoshitaka

Archive | 2008

COATING-DEVELOPING APPARATUS, OPERATIONAL METHOD FOR COATING-DEVELOPING APPARATUS AND STORAGE MEDIUM

Shin Tomonori; Okamura Kouji; Kaneko Tomohiro; Miyata Akira; Fujimaru Syuzo

Archive | 2007

Substrate transportation processing apparatus and method of trouble measures of substrate transportation processing apparatus and computer readable medium encoded with a program for trouble measures of substrate transportation processing apparatus

Kaneko Tomohiro; Miyata Akira

Archive | 2012

COATING METHOD, COATING APPARATUS, AND STORAGE MEDIUM

Miyata Akira; Hara Yoshitaka; Fujimura Koji

Archive | 2010

APPARATUS AND METHOD FOR APPLICATION AND DEVELOPMENT, AND STORAGE MEDIUM

Kaneko Tomohiro; Miyata Akira; Hara Yoshitaka

Archive | 2009

EXPOSURE DEVICE, EXPOSURE METHOD, AND DEVICE MANUFACTURING METHOD

Fujima Toshihisa; Kumazaki Kiyoaki; Miyata Akira

Archive | 2009

OBJECT PROCESSING SYSTEM, OBJECT PROCESSING METHOD, PROCESSING APPARATUS, SUBSTRATE PROCESSING METHOD, AND DEVICE MANUFACTURING METHOD

Tsuji Toshihiko; Kumazaki Kiyoaki; Fujima Toshihisa; Kaneko Tomohiro; Miyata Akira

Archive | 2009

COATING-DEVELOPING DEVICE, COATING-DEVELOPING METHOD AND STORAGE MEDIUM

Miyata Akira; Kaneko Tomohiro

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Collaboration

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Kaneko Tomohiro

Tokyo Electron

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Hara Yoshitaka

Tokyo Electron

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