Montserrat Fernández-Bolaños Badia
École Polytechnique Fédérale de Lausanne
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Featured researches published by Montserrat Fernández-Bolaños Badia.
Nanotechnology | 2011
A. Arun; Hélène Le Poche; T. Idda; D. Acquaviva; Montserrat Fernández-Bolaños Badia; Philippe Pantigny; P. Salet; Adrian M. Ionescu
In this work, tunable MEMS capacitors are realized using a vertically grown carbon nanotube array. The vertical CNT array forms an effective CNT membrane, which can be electrostatically actuated like the conventional metal plates used in MEMS capacitors. The CNT membrane is grown on titanium nitride metal lines, with a Al/Fe bi-layer as buffer layer and catalyst material respectively, using chemical vapor deposition process. Two different anchor configurations are investigated. A maximum capacitance of 400 fF and maximum tunability of 5.8% is extracted from the S-parameter measurements. Using the tunable MEMS vertical array capacitor a voltage controlled oscillator (VCO) is demonstrated showing promise for integrating CNTs for communications applications.
european solid state device research conference | 2014
Christopher L. Ayala; Daniel Grogg; Antonios Bazigos; Montserrat Fernández-Bolaños Badia; Urs T. Duerig; Michel Despont; Christoph Hagleitner
Nanoelectromechanical (NEM) switches have the potential to complement or replace traditional CMOS transistors in the area of ultra-low power digital electronics. This paper reports the demonstration of the first ring oscillator built using cell-level digital logic elements based on curved NEM switches. The NEM switch has a size of 5×3 μm2, an air gap of 60 nm and is coated with amorphous carbon (a-C) for reliable operation. The ring oscillator operates at a frequency of 6.7 MHz and confirms the simulated inverter propagation delay of 25 ns. The successful fabrication and measurement of this demonstrator is a key milestone on the way towards an optimized, scaled technology with sub-nanosecond switching times, lower operating voltages and VLSI implementation.
Proceedings of SPIE - The International Society for Optical Engineering | 2013
Tomasz Bieniek; Grzegorz Janczyk; P. Janus; P. Grabiec; Marek Nieprzecki; Grzegorz Wielgoszewski; Magdalena Moczała; Teodor Gotszalk; Elizabeth Buitrago; Montserrat Fernández-Bolaños Badia; Adrian M. Ionescu
Silicon nanowires (SiNWs) have undergone intensive research for their application in novel integrated systems such as field effect transistor (FET) biosensors and mass sensing resonators profiting from large surface-to-volume ratios (nano dimensions). Such devices have been shown to have the potential for outstanding performances in terms of high sensitivity, selectivity through surface modification and unprecedented structural characteristics. This paper presents the results of mechanical characterization done for various types of suspended SiNWs arranged in a 3D array. The characterization has been performed using techniques based on atomic force microscopy (AFM). This investigation is a necessary prerequisite for the reliable and robust design of any biosensing system. This paper also describes the applied investigation methodology and reports measurement results aggregated during series of AFM-based tests.
International Journal of Microwave and Wireless Technologies | 2011
Montserrat Fernández-Bolaños Badia; Pierre Nicole; Adrian M. Ionescu
This paper reports on the potential of RF-MEMS technology based on aluminum nitride capacitive dielectric and nickelsuspended membranes to provide RF circuit functions in reconfigurable front-end radios. The RF performance of capacitive switches, distributed MEMS transmission lines (DMTLs) phase shifters for beam steering and tunable filters, including center frequency and bandwidth tuning of bandpass and band-stop filters are presented. Detailed characterization based on S-parameter data demonstrates very promising figures of merit of all fabricated demonstrators from 5 to 40 GHz.
Sensors and Actuators B-chemical | 2013
Elizabeth Buitrago; Giorgos Fagas; Montserrat Fernández-Bolaños Badia; Yordan M. Georgiev; Matthieu Berthomé; Adrian M. Ionescu
Sensors and Actuators B-chemical | 2014
Elizabeth Buitrago; Montserrat Fernández-Bolaños Badia; Yordan M. Georgiev; Ran Yu; Olan Lotty; Justin D. Holmes; Adrian M. Nightingale; Hoël Guerin; Adrian M. Ionescu
Sensors and Actuators B-chemical | 2015
Hoël Guerin; Hélène Le Poche; Roland Pohle; Elizabeth Buitrago; Montserrat Fernández-Bolaños Badia; Jean Dijon; Adrian M. Ionescu
device research conference | 2013
Elizabeth Buitrago; Montserrat Fernández-Bolaños Badia; Yordan M. Georgiev; Ran Yu; Olan Lotty; Justin D. Holmes; Adrian M. Nightingale; Adrian M. Ionescu
Archive | 2014
Emanuele Andrea Casu; Sara Rigante; Montserrat Fernández-Bolaños Badia; Mihai Adrian Ionescu
Microsystem Technologies-micro-and Nanosystems-information Storage and Processing Systems | 2014
Giorgos Fagas; Michael Nolan; Yordan M. Georgiev; Ran Yu; Olan Lotty; Nikolay Petkov; Justin D. Holmes; Guobin Jia; Björn Eisenhawer; Annett Gawlik; Fritz Falk; Naser Khosropour; Elizabeth Buitrago; Montserrat Fernández-Bolaños Badia; F. Krummenacher; Adrian M. Ionescu; Maher Kayal; Adrian M. Nightingale; John C. de Mello; Erik Puik; Franc van der Bent; Rik Lafeber; Rajesh Ramaneti; Hien Duy Tong; Cees J.M. van Rijn