Mutsuaki Murakami
Kaneka Corporation
Network
Latest external collaboration on country level. Dive into details by clicking on the dots.
Publication
Featured researches published by Mutsuaki Murakami.
Micromachines | 2018
Junji Sone; Mutsuaki Murakami; Atsushi Tatami
We aimed to develop a process for constructing a carbon-based microelectromechanical system (MEMS). First, we prepared a highly oriented pyrolytic graphite (HOPG) crystal microsheet by exfoliation. We fabricated cantilevers and a double-clamped beam by controlling the thickness of the HOPG microsheet using a MEMS process. Second, we used a graphite sheet with contour line adhesion by metal sputter deposition. Third, we used a highly accurate graphite sheet with face adhesion and laser cutting. The first resonance frequencies were evaluated. We confirmed improvement in Q values to 1/10 level of a quarts vibrator, high performance, and a simple structure.
Archive | 2003
Shigeru Tanaka; Takashi Itoh; Masaru Nishinaka; Kanji Shimo-Ohsako; Mutsuaki Murakami
Archive | 2002
Masaru Nishinaka; Kanji Shimo-Ohsako; Takashi Itoh; Mutsuaki Murakami
Archive | 2003
Yasushi Nishikawa; Mutsuaki Murakami; Kiyokazu Akahori
Archive | 2004
Kazuyuki Tateishi; Mutsuaki Murakami; Hideo Yamagishi; Hiroyuki Furutani; Masamitsu Tachibana
Archive | 2002
Taku Ito; Mutsuaki Murakami; Masaru Nishinaka; Kanji Shimooosako; Shigeru Tanaka; 下大迫寛司; 卓 伊藤; 村上睦明; 田中 滋; 賢 西中
Archive | 2010
Kei Inada; Makoto Mishiro; Mutsuaki Murakami; Taiji Nishikawa; 真琴 三代; 睦明 村上; 敬 稲田; 泰司 西川
Archive | 2003
Masaru Nishinaka; Takashi Itoh; Shigeru Tanaka; Mutsuaki Murakami
Archive | 2003
Masaru Nishinaka; Takashi Itoh; Shigeru Tanaka; Mutsuaki Murakami
Archive | 2005
Yasushi Nishikawa; Shuhei Wakahara; Mutsuaki Murakami
