Mutsumi Mimasu

Output Characteristics of a KrF Laser Dependent on the F2 Absorption in Inactive Regions

Dependence of the output power of a discharge-pumped KrF laser on the F2 absorption in inactive regions has been studied. The F2 absorption cross section at 248 nm was experimentally determined to be 1.6×10-20 cm2. A greater than 15% increase in the output was obtained by filling the inactive regions on the optical path with a rare-gas mixture.

Spectrally narrowed lasing of a self-injection KrF excimer laser

Spectrally nantwed lasing of a KrF excimer laser has teen ahieved by a self-injection technique using abeam splitter for power extraction aixi intravity etalons for spectral-narrowing. The laser cavity is divithi into an amplifying branch aix! a spectralnarrowing branch. The spectral bandwidth was narrowed to <3pm FWHM with air-sed etalons placed in the spectral-narrowing branch. A laser propagation model was intrOdUced for describing the laser intensity traveling in the laser cavity. The calculated intensityincident onthe intracavityetalons wassmaller thanthat in theconventional Fabry-Perotcavity withplane-parallel mirrors.