Myung-Geun Song

A novel tensile Si (n) and compressive SiGe (p) dual-channel CMOS FinFET co-integration scheme for 5nm logic applications and beyond

A novel tensile Si (tSi) and compressive SiGe (cSiGe) dual-channel FinFET CMOS co-integration scheme, aimed at logic applications for the 5nm technology node and beyond, is demonstrated for the first time, showing electrical performance benefits and excellent co-integration feasibility. A Strain-Relaxed SiGe Buffer (SRB) layer is introduced as buried stressor and successfully transfers up to ∼1 GPa uniaxial tensile and compressive stress to the Si/SiGe n-/p-channels simultaneously. As the result, both tSi and cSiGe devices show a 40% and 10% electron and hole mobility gain over unstrained Si, respectively. Through a novel gate stack solution including a common interfacial layer (IL), HK, and single metal gate for both n- and pFET, secured process margin for 5nm gate length, low interface trap density (Dit) for SiGe channel and threshold voltage (Vt) target for both the Si and SiGe device are successfully demonstrated. Lastly, reliability investigation shows that tSi and cSiGe, employing the newly developed common gate stack scheme, possess superior reliability characteristics compared with those of equivalent Si devices.

Using the effects of pH and moisture to synthesize highly organized mesoporous titania thin films

Highly ordered mesoporous titania films were synthesized within a short time period by controlling the pH of sols and moisture exposure of as-prepared films.

Interference-like patterns of static magnetic fields imprinted into polymer/nanoparticle composites

Interference of waves is important and used in many areas of science and technology but does not extend to static magnetic fields which lack the wave structure. On the other hand, magnetic fields can be spatially modulated using microstructured materials comprising magnetic and non-magnetic domains. Here, we show that when such spatial modulation is coupled to the dynamics of magnetic particles, it can give rise to interference-like patterns. These patterns are imprinted into thin polymer films by overlaying “stamps” presenting periodic arrays of magnetic and nonmagnetic regions. The structures that emerge from such a superposition are sensitive to any motions of the stamps, can depend on the history of these motions, can produce features significantly smaller than those in the stamps, and can be either planar or three-dimensional.For materials fabrication, it is most efficient to create various patterns from the same set of templates. Here, the authors show that when magnetic particles are exposed to stacks of periodic magnetic fields, they can form dynamic interference-like patterns that reflect where the magnetic fields overlap.