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Nakagawa Shinya

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Publication

Featured researches published by Nakagawa Shinya.

Archive | 1985

METHOD AND DEVICE FOR PROJECTION AND EXPOSURE

Komoriya Susumu; Nishizuka Hiroshi; Nakagawa Shinya; Maejima Hiroshi

Archive | 1990

DETECTING METHOD FOR PATTERN ON SEMICONDUCTOR ELEMENT AND MANUFACTURE OF SEMICONDUCTOR DEVICE USING SAID METHOD AND PROJECTING AND EXPOSING DEVICE USED THEREFOR

Komoriya Susumu; Kawanabe Takao; Irikita Nobuyuki; Nakagawa Shinya; Oosakatani Takayoshi

Archive | 1986

OFFSET CONTROLLING SYSTEM

Nakagawa Shinya; Komoriya Susumu; Nishizuka Hiroshi

Archive | 1989

ALIGNMENT AND APPARATUS THEREFOR

Komoriya Susumu; Kawanabe Takao; Nakagawa Shinya; Oosakaya Takayoshi

Archive | 1985

FRESNEL ZONE TARGET

Nakagawa Shinya; Komoriya Susumu; Nishizuka Hiroshi

Archive | 1994

PROJECTION EXPOSURE AND ALIGNER THEREFOR

Komoriya Susumu; Nishizuka Hiroshi; Nakagawa Shinya; Maejima Hiroshi

Archive | 1990

MANUFACTURE OF SEMICONDUCTOR INTEGRATED CIRCUIT, PATTERN DETECTING METHOD AND DEVICE FOR SEMICONDUCTOR ALIGNMENT AND STEPPING REDUCED EXPOSURE USED THEREON

Komoriya Susumu; Kawanabe Takao; Nakagawa Shinya; Oosakaya Takayoshi; Irikita Nobuyuki

Archive | 1990

MANUFACTURE OF SEMICONDUCTOR INTEGRATED CIRCUIT AND ALIGNER USED THEREIN

Komoriya Susumu; Kawanabe Takao; Nakagawa Shinya; Oosakaya Takayoshi

Archive | 1989

FORMATION OF SEMICONDUCTOR INTEGRATED CIRCUIT

Nakagawa Shinya; Komoriya Susumu; Morita Mitsuhiro; Irikita Nobuyuki; Inoue Morio

Archive | 1991

CONTROL METHOD FOR EXPOSURE POSITION DETECTION; ALIGNER USED FOR IT

Komoriya Susumu; Takagaki Tetsuya; Kuroiwa Keizo; Nakagawa Shinya; Sekiguchi Kohei

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Komoriya Susumu

Hitachi

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Nishizuka Hiroshi

Hitachi

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