Nam Seok Roh

58.5: Late-News Paper: 14.3 inch Active Matrix-Based Plastic Electrophoretic Display Using Low Temperature Processes

A 14.3-inch black and white plastic electrophoretic display (EPD) was developed at the resolution of 1280 × 900 lines (112 ppi). All of the processes of TFT and electrophoretic sheet (EPS) lamination were not only carried out below 120°C, but also optimized for large area TFT-EPD on PEN plastic films.

42.1: Invited Paper: Processing Flexible Displays

We present the fabrication aspect of flexible displays. Fabrication of flexible displays requires proper material selection, handling of plastic film substrates, low temperature process for the fabrication of TFTs on plastic substrate. In addition, for the low cost fabrication approach, direct printing of TFT patterning without photolithography process is also required. We describe Samsung LCDs approach path to the fabrication of flexible displays and future plan to develop the practical method that leads to the production level of flexible displays.

New Crystallization Method of Amorphous Silicon by Selective Area Heating for Stamp Process

We propose a new crystallization technique called selective area heating. In this study, we investigated a new technique for high-reliability selective area crystallization of a-Si films that does not cause thermal damage to glass substrates. We reduced the crystallization time as compared to the conventional solid phase crystallization method using a stamp-type isolated thin heater. The thin heater was fabricated with a layer of Pt on a quartz substrate via Ta adhesion and capping layers. A crystalline transverse optic phonon peak at about 519 cm−1 was seen in Raman scattering spectra, showing that the films were crystallized. The poly-Si grain size was found to be smaller than 100 nm, and the dendritic structure was found using scanning electron microscopy.