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Namikawa Makoto

Nitto Denko

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Publication

Featured researches published by Namikawa Makoto.

Archive | 1999

Method for removing both anti-etching materials and sidewall protection films

Toyoda Eiji; Namikawa Makoto; Hashimoto Kouichi; Shirai Seiichirou

Archive | 2015

Carrying member with a cleaning function and method of cleaning substrate processing equipment

Terada Yoshio; Namikawa Makoto; Uenda Daisuke; Funatsu Asami

Archive | 2009

VERFAHREN ZUM ENTSCHICHTEN VON RESISTMATERIAL

Toyoda Eiji; Namikawa Makoto; Okeyui Takuji

Archive | 2007

LABEL SHEET FOR CLEANING, METHOD OF MANUFACTURING A LABEL SHEET, CONVEYING MEMBER HAVING CLEANING FUNCTION AND METHOD OF CLEANING A SUBSTRATE PROCESSING EQUIPMENT

Namikawa Makoto; Terada Yoshio; Nukaga Jirou; Toyoda Eiji

Archive | 2006

REINIGUNGSBLATT, FÖRDERELEMENT DAFÜR UND REINIGUNGSVERFAHREN FÜR SUBSTRAT-BEARBEITUNGSVORRICHTUNGEN IN DEM DIESE VERWENDET WERDEN

Namikawa Makoto; Terada Yoshio; Toyoda Eiji

Archive | 2006

HEAT RESISTANT RESIN AND DUST REMOVING SUBSTRATE USING THE SAME

Fujii Hirofumi; Uenda Daisuke; Terada Yoshio; Funatsu Asami; Namikawa Makoto; Maruoka Nobuaki; Ishizaka Hitoshi; Amano Yasyhiro

Archive | 2006

Heat-resistant resin and dust eliminating substrate using the same

Fujii Hirofumi; Uenda Daisuke; Terada Yoshio; Funatsu Asami; Namikawa Makoto; Nobuaki Maruoka; Ishizaka Hitoshi; Yasuhiro Amano

Archive | 2005

CLEANING MEMBER AND CLEANING METHOD CONTAINING A CLEANING LAYER HAVING A TENSILE STRESS FROM 0.3 TO 3000N/MM2 AT THE TRANSFORMATION OF 10%

Namikawa Makoto; Terada Yoshio; Toyoda Eiji

Archive | 2005

HEAT-RESISTANT RESIN, METHOD FOR PRODUCTION THEREOF AND BASE PLATE FOR DUST REMOVAL OF SUBSTRATE TREATING DEVICE USING THE RESIN

Fujii Hirofumi; Uenda Daisuke; Maruoka Nobuaki; Terada Yoshio; Ishizaka Hitoshi; Namikawa Makoto

Archive | 2004

PROCEDIMIENTO PARA LA RETIRADA EN UNA SOLA OPERACION DE UN ELEMENTO RESISTENTE Y UNA CAPA PROTECTORA DE PARED LATERAL.

Toyoda Eiji; Namikawa Makoto; Hashimoto Kouichi; Shirai Selichiro

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Terada Yoshio

Nitto Denko

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Toyoda Eiji

Nitto Denko

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Hashimoto Kouichi

Nitto Denko

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Shirai Selichiro

Nitto Denko

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Nobuaki Maruoka

Nitto Denko

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Yasuhiro Amano

Nitto Denko

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