Naoki Nagai

Method of manufacturing silicon monocrystal by continuously charged Czochralski method

Method for feeding granular silicon material, feed pipe used in the method, and method of manufacturing a silicon monocrystal

Apparatus for recharging of silicon granules in a czochralski single crystal growing operation

Method of manufacturing silicon monocrystal using continuous czochralski method

Method for feeding a granular raw material and feeding apparatus

Method for producing a silicon single crystal and a silicon single crystal

Continuously charged czochralski method of manufacturing silicon monocrystal, and dopant feeding apparatus

Method of manufacturing a silicon monocrystal

Method and apparatus for recharging of silicon granules in Czochralski single crystal growing

Procédé pour produire un monocristal de silicum employant une méthode continue du type czochralski