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Neff Willi

Philips

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Publication

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Archive | 2002

Verfahren und Vorrichtung zum Erzeugen von extrem ultravioletter Strahlung und weicher Röntgenstrahlung

Klein Juergen; Neff Willi; Seiwert Stefan; Bergmann Klaus; Pankert Joseph

Archive | 2006

Charging capacitor charging device for operation of discharge lamp, has controller calculating switching time of switch for observation of reference values in real time, and controlling switch to calculated switching time for switching

Klein Juergen; Seiwert Stefan; Probst Sven; Loef Christoph; Neff Willi

Archive | 2005

Verfahren und Vorrichtung zum Erzeugen von insbesondere EUV-Strahlung und/oder weicher Röntgenstrahlung

Derra Guenther Hans; Apetz Rolf Theo Anton; Zink Peter; Neff Willi; Rosier Oliver

Archive | 2006

CHARGING DEVICE FOR A CHARGING CAPACITOR, IN PARTICULAR FOR SUPPLYING DISCHARGE LAMPS

Klein Jurgen; Seiwert Stefan; Probst Sven; Loef Christoph; Neff Willi

Archive | 2004

Process and device for producing extreme ultraviolet ray/weak x-ray

Neff Willi; Bergmann Klaus; Pankert Joseph; Rosier Oliver

Archive | 2006

Vorrichtung und Verfahren zum Schutz einer optischen Komponente, insbesondere in einer EUV-Quelle

Neff Willi; Loeken Michael

Archive | 2000

Ultraviolet radiation generation method involves using plasma as radiation emitting medium produced with pulsed high current discharge and driven by magnetic field of discharge current

Lebert Rainer; Neff Willi; Engel Axel; Bergmann Klaus

Archive | 2012

VERFAHREN UND EINRICHTUNG ZUM ERZEUGEN INSBESONDERE VON EUV-STRAHLUNG UND/ODER WEICHER RÖNTGENSTRAHLUNG

Derra Guenther Hans; Apetz Rolf Theo Anton; Neff Willi; Rosier Oliver; Zink Peter

Archive | 2011

METHOD AND DEVICE FOR GENERATING PLASMA THROUGH ELECTRIC DISCHARGE IN DISCHARGE SPACE

Bosch Eric Gerardus Theodoor; Jonkers Jeroen; Neff Willi; Derra Guenther Hans

Archive | 2007

VERFAHREN UND VORRICHTUNG ZUR HERSTELLUNG VON EXTREM-ULTRAVIOLETTSTRAHLUNG ODER WEICHER RÖNTGENSTRAHLUNG

Jonkers Jeroen; Vaudrevange Dominik Marcel; Neff Willi

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Bergmann Klaus

Philips

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Derra Guenther Hans

Philips

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Jonkers Jeroen

Philips

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Klein Juergen

Philips

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Probst Sven

Philips

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Rosier Oliver

Philips

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Seiwert Stefan

Philips

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Apetz Rolf Theo Anton

Philips

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Loef Christoph

Philips

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Loeken Michael

Philips

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