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Ni Tuqiang

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Publication

Featured researches published by Ni Tuqiang.

Archive | 2008

Radio frequency power source system and the plasma reaction chamber using that radio frequency power source system

Ni Tuqiang; Chen Jinyuan; Yin Gerald-Z; Qian Xue-Yu; Iizuka Hiroshi

Archive | 2017

Inductively-coupled plasma processor

Liu Ji-Lin; Zuo Taotao; Wu Di; Huang Zhilin; Ni Tuqiang

Archive | 2014

Wafer edge protection ring and method for reducing particles at wafer edge

Zhou Xu-Sheng; Xu Chaoyang; Ni Tuqiang; Xu Songlin

Archive | 2013

Semiconductor etching device and semiconductor etching method

Wang Zhao-Xiang; Liang Jie; Su Xingcai; Ni Tuqiang

Archive | 2010

SYSTEM AND METHOD OF SENSING AND REMOVING RESIDUAL CHARGE FROM SEMICONDUCTOR PROCESSED COMPONENT

Ni Tuqiang; Chen Jinyuan; Wang Ye; Du Ruoxion; Ouyang Liang

Archive | 2016

Plasma processing apparatus, substrate unloading apparatus and method

Zuo Taotao; Wu Di; Ni Tuqiang

Archive | 2014

Plasma processing device and static chuck thereof

Zuo Taotao; Wu Di; Zhou Ning; Ni Tuqiang; Wang Hongqing

Archive | 2013

Inductance coupling plasma processing chamber of automatic frequency tuning source and bias radio frequency power source

Luo Weiyi; Xu Songlin; Ni Tuqiang

Archive | 2009

REACTIVE ION ETCHING CHAMBER THAT CONTAINS MANY TREATMENT STATIONS EXCLUDING COUPLINGS AMONG THEM

Qian Xue-Yu; Chen Jinyuan; In Shigyo; Ni Tuqiang

Archive | 2015

Faraday shield plate and plasma treatment system using Faraday shield plate

Zuo Taotao; Ni Tuqiang

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Collaboration

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Ho Henry

Applied Materials

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Luo Lee

Applied Materials

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