Niko Münzenrieder

Wafer-scale design of lightweight and transparent electronics that wraps around hairs

Electronics on very thin substrates have shown remarkable bendability, conformability and lightness, which are important attributes for biological tissues sensing, wearable or implantable devices. Here we propose a wafer-scale process scheme to realize ultra flexible, lightweight and transparent electronics on top of a 1-μm thick parylene film that is released from the carrier substrate after the dissolution in water of a polyvinyl- alcohol layer. The thin substrate ensures extreme flexibility, which is demonstrated by transistors that continue to work when wrapped around human hairs. In parallel, the use of amorphous oxide semiconductor and high-K dielectric enables the realization of analogue amplifiers operating at 12 V and above 1 MHz. Electronics can be transferred on any object, surface and on biological tissues like human skin and plant leaves. We foresee a potential application as smart contact lenses, covered with light, transparent and flexible devices, which could serve to monitor intraocular pressure for glaucoma disease.

Fabrication and transfer of flexible few-layers MoS2 thin film transistors to any arbitrary substrate.

Recently, transition metal dichalcogenides (TMDCs) have attracted interest thanks to their large field effective mobility (>100 cm(2)/V · s), sizable band gap (around 1-2 eV), and mechanical properties, which make them suitable for high performance and flexible electronics. In this paper, we present a process scheme enabling the fabrication and transfer of few-layers MoS2 thin film transistors from a silicon template to any arbitrary organic or inorganic and flexible or rigid substrate or support. The two-dimensional semiconductor is mechanically exfoliated from a bulk crystal on a silicon/polyvinyl alcohol (PVA)/polymethyl methacrylane (PMMA) stack optimized to ensure high contrast for the identification of subnanometer thick flakes. Thin film transistors (TFTs) with structured source/drain and gate electrodes are fabricated following a designed procedure including steps of UV lithography, wet etching, and atomic layer deposited (ALD) dielectric. Successively, after the dissolution of the PVA sacrificial layer in water, the PMMA film, with the devices on top, can be transferred to another substrate of choice. Here, we transferred the devices on a polyimide plastic foil and studied the performance when tensile strain is applied parallel to the TFT channel. We measured an electron field effective mobility of 19 cm(2)/(V s), an I(on)/I(off)ratio greater than 10(6), a gate leakage current as low as 0.3 pA/μm, and a subthreshold swing of about 250 mV/dec. The devices continue to work when bent to a radius of 5 mm and after 10 consecutive bending cycles. The proposed fabrication strategy can be extended to any kind of 2D materials and enable the realization of electronic circuits and optical devices easily transferrable to any other support.

Metal oxide semiconductor thin-film transistors for flexible electronics

The field of flexible electronics has rapidly expanded over the last decades, pioneering novel applications, such as wearable and textile integrated devices, seamless and embedded patch-like systems, soft electronic skins, as well as imperceptible and transient implants. The possibility to revolutionize our daily life with such disruptive appliances has fueled the quest for electronic devices which yield good electrical and mechanical performance and are at the same time light-weight, transparent, conformable, stretchable, and even biodegradable. Flexible metal oxide semiconductor thin-film transistors (TFTs) can fulfill all these requirements and are therefore considered the most promising technology for tomorrows electronics. This review reflects the establishment of flexible metal oxide semiconductor TFTs, from the development of single devices, large-area circuits, up to entirely integrated systems. First, an introduction on metal oxide semiconductor TFTs is given, where the history of the field is revisited, the TFT configurations and operating principles are presented, and the main issues and technological challenges faced in the area are analyzed. Then, the recent advances achieved for flexible n-type metal oxide semiconductor TFTs manufactured by physical vapor deposition methods and solution-processing techniques are summarized. In particular, the ability of flexible metal oxide semiconductor TFTs to combine low temperature fabrication, high carrier mobility, large frequency operation, extreme mechanical bendability, together with transparency, conformability, stretchability, and water dissolubility is shown. Afterward, a detailed analysis of the most promising metal oxide semiconducting materials developed to realize the state-of-the-art flexible p-type TFTs is given. Next, the recent progresses obtained for flexible metal oxide semiconductor-based electronic circuits, realized with both unipolar and complementary technology, are reported. In particular, the realization of large-area digital circuitry like flexible near field communication tags and analog integrated circuits such as bendable operational amplifiers is presented. The last topic of this review is devoted for emerging flexible electronic systems, from foldable displays, power transmission elements to integrated systems for large-area sensing and data storage and transmission. Finally, the conclusions are drawn and an outlook over the field with a prediction for the future is provided.

The Effects of Mechanical Bending and Illumination on the Performance of Flexible IGZO TFTs

Amorphous indium-gallium-zinc-oxide (a-IGZO) is an interesting semiconducting material for use in flexible thin-film-transistor (TFT) fabrication due to the high carrier mobility and low deposition temperatures. To use these TFTs in flexible applications, their behavior under applied mechanical strain and changing illumination, as well as the influence of bending on reflattened TFTs, needs to be understood. We have fabricated a-IGZO TFTs on flexible substrates and measured their behavior under tensile and compressive strains down to bending radii <; 10 mm. Bending tests were applied in the dark, as well as under 90-lx illumination. Without illumination, the tensile and compressive strains caused a little change in the TFT performance, but the influence of the tensile strain combined with illumination causes changes in the TFT mobility of 15% and changes in threshold voltage of - 0.11 V. By comparison, the performance of illuminated TFTs under the applied compressive strain changes little compared with measurements in the dark. The impact of repeated tensile bending and reflattening shows a similar picture; bending tests carried out in the dark resulted in a nearly constant threshold voltage, but with illumination, we observed a shift of -0.1 V after 40 min of repeated bending.

Flexible Self-Aligned Amorphous InGaZnO Thin-Film Transistors With Submicrometer Channel Length and a Transit Frequency of 135 MHz

Flexible large area electronics promise to enable new devices such as rollable displays and electronic skins. Radio frequency (RF) applications demand circuits operating in the megahertz regime, which is hard to achieve for electronics fabricated on amorphous and temperature sensitive plastic substrates. Here, we present self-aligned amorphous indium-gallium-zinc oxide-based thin-film transistors (TFTs) fabricated on free-standing plastic foil using fabrication temperatures . Self-alignment by backside illumination between gate and source/drain electrodes was used to realize flexible transistors with a channel length of 0.5 μm and reduced parasitic capacities. The flexible TFTs exhibit a transit frequency of 135 MHz when operated at 2 V. The device performance is maintained when the TFTs are bent to a tensile radius of 3.5 mm, which makes this technology suitable for flexible RFID tags and AM radios.

Impact of Mechanical Bending on ZnO and IGZO Thin-Film Transistors

Both zinc-oxide (ZnO) and gallium-indium-ZnO (IGZO) are attractive as semiconductors to replace hydrogenated amorphous silicon in flexible thin-film transistors (TFTs) due to their high charge carrier mobility and low deposition temperature. However, the electrical performance of flexible TFTs needs to be insensitive to mechanical bending. We have fabricated TFTs using ZnO and IGZO semiconducting layers on polyimide substrates and exposed TFTs to tensile bending radii down to 10 mm. While the mobility, threshold voltage, and subthreshold slope of IGZO TFTs remained essentially unchanged over the entire bending range, the electrical performance parameters of ZnO TFTs were strongly degraded by bending. For ZnO TFTs bent to a radius of 10 mm, the mobility decreased by more than two orders of magnitude, the threshold voltage increased by a factor of ~ 5, and the subthreshold slope increased by a factor of ~ 2. Our results show that IGZO should be the material of choice for robust flexible thin-film transistors. Experimental evidence points toward the formation of microcracks as the cause of ZnO sensitivity to bending.

IGZO TFT-Based All-Enhancement Operational Amplifier Bent to a Radius of 5 mm

An all-enhancement operational amplifier operating at 5 V and comprising 16 n-type amorphous indium-gallium-zinc-oxide thin-film transistors (TFTs) is fabricated on a 50 μm thick flexible polyimide substrate. The operational amplifier has an open loop voltage gain of 18.7 dB and a unity-gain frequency of 472 kHz while the common-mode rejection ratio (CMMR) is larger than 40 dB. The mechanical flexibility of the amplifier is demonstrated by bending the circuit to a radius of 5 mm, which corresponds to a tensile strain of 0.5% parallel to the TFT channels. The bent amplifier shows the same output behavior as when flat. The power consumption of the operational amplifier is 900 μW, regardless whether the circuit is flat or bent.

Integration Method for Electronics in Woven Textiles

This paper presents a technology to integrate electronics at the thread level in woven textiles. Flexible plastic substrates are cut into stripes and serve as carriers for electronics, including ICs, thin-film devices, interconnect lines, and contact pads. These functionalized plastic stripes, called e-stripes, are woven into textiles. Conductive threads perpendicular to the e-stripes electrically interconnect the devices on the individual e-stripes. The integration of e-stripes and conductive threads into the woven textiles is compatible with commercial weaving processes and suitable for large-scale manufacturing. We demonstrate the technology with a woven textile containing five e-stripes with digital temperature sensors. Conductive threads interconnect the e-stripes among each other to form a bus topology. We show that the contacts between the conductive threads and the pads on e-stripes as well as the contacts between the temperature sensors and e-stripes withstand shear forces of at least 20 N. The integration of the temperature sensors into the textile increases the bending rigidity of the textile by 30%; however, it is still possible to obtain a textile-bending radii of <;1 mm. This technology seamlessly integrates electronics into textiles, thus advancing the field of smart textiles and wearable computing.

Flexible Self-Aligned Double-Gate IGZO TFT

In this letter, flexible double-gate (DG) thin-film transistors (TFTs) based on InGaZnO4 and fabricated on free standing plastic foil, using self-alignment (SA) are presented. The usage of transparent indium-tin-oxide instead of opaque metals enables SA of source-, drain-, and top-gate contacts. Hence, all layers, which can cause parasitic capacitances, are structured by SA. Compared with bottom-gate reference TFTs fabricated on the same substrate, DG TFTs exhibit a by 68% increased transconductance and a subthreshold swing as low as 109 mV/dec decade (-37%). The clockwise hysteresis of the DG TFTs is as small as 5 mV. Because of SA, the source/drain to gate overlaps are as small as ≈ 1 μm leading to parasitic overlap capacitances of 5.5 fF μm-1. Therefore a transit frequency of 5.6 MHz is measured on 7.5 μm long transistors. In addition, the flexible devices stay fully operational when bent to a tensile radius of 6 mm.

Biomimetic Microelectronics for Regenerative Neuronal Cuff Implants

Smart biomimetics, a unique class of devices combining the mechanical adaptivity of soft actuators with the imperceptibility of microelectronics, is introduced. Due to their inherent ability to self-assemble, biomimetic microelectronics can firmly yet gently attach to an inorganic or biological tissue enabling enclosure of, for example, nervous fibers, or guide the growth of neuronal cells during regeneration.